The influence of tip performance on scanning probe lithography
文献类型：期刊论文
| 作者 | Zhou HL ; Li Z ; Wu AG ; Zheng JP ; Zhang J ; Wu SF |
| 刊名 | applied surface science
 |
| 出版日期 | 2004 |
| 卷号 | 221期号:1-4页码:402-407 |
| 关键词 | DIP-PEN NANOLITHOGRAPHY ATOMIC-FORCE MICROSCOPE CONSTRUCTIVE NANOLITHOGRAPHY ASPECT-RATIO FABRICATION MONOLAYERS TEMPLATES SILICON SCALE FILMS |
| ISSN号 | 0169-4332 |
| 通讯作者 | li z |
| 中文摘要 | scanning probe lithography (spl), employing the tip of an atomic force microscope to mechanically pattern various materials in nanoscale region has provided a simple but significant method for making nanostructures. we use this technique for the lithography of several kinds of substrate surfaces. the tip performance has been found to be a crucial factor in the lithographic process. four types of cantilevers are employed in nanolithography, including standard silicon nitride (dnp), tapping mode(tm) etched silicon (tesp(w)), uncoated silicon cantilever (nsc21/50) and conductive platinum/iridium-coated probe. results demonstrate that tips with smaller spring constants can not be used for physically scribing and nanomanipulating in our experiment. the possible mechanism of our experiment is discussed. |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000187721700051 |
| 公开日期 | 2010-08-17 |
| 源URL | [http://202.98.16.49/handle/322003/15681]  |
| 专题 | 长春应用化学研究所_长春应用化学研究所知识产出_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhou HL,Li Z,Wu AG,et al. The influence of tip performance on scanning probe lithography[J]. applied surface science,2004,221(1-4):402-407. |
| APA | Zhou HL,Li Z,Wu AG,Zheng JP,Zhang J,&Wu SF.(2004).The influence of tip performance on scanning probe lithography.applied surface science,221(1-4),402-407. |
| MLA | Zhou HL,et al."The influence of tip performance on scanning probe lithography".applied surface science 221.1-4(2004):402-407. |
入库方式： OAI收割
来源：长春应用化学研究所
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