Scanned probe oxidation on an octadecyl-terminated silicon (111) surface with an atomic force microscope: kinetic investigations in line patterning
文献类型：期刊论文
| 作者 | Yang ML ; Zheng ZK ; Liu YQ ; Zhang BL |
| 刊名 | nanotechnology
 |
| 出版日期 | 2006 |
| 卷号 | 17期号:1页码:330-337 |
| 关键词 | SELF-ASSEMBLED MONOLAYERS HYDROGEN-PASSIVATED SILICON FARADAIC CURRENT DETECTION FIELD-INDUCED OXIDATION ALKYL MONOLAYERS ORGANIC MONOLAYERS ANODIZATION LITHOGRAPHY CHEMICAL-MODIFICATION SURFACE MODIFICATION POROUS SILICON |
| ISSN号 | 0957-4484 |
| 通讯作者 | zhang bl |
| 中文摘要 | scanned probe oxidation (spo) nanolithography has been performed with an atomic force microscope (afm) on an octadecyl-terminated silicon (111) surface to create protuberant oxide line patterns under ambient conditions in contact mode. the kinetic investigations of this spo process indicate that the oxide line height increases linearly with applied voltage and decreases logarithmically with writing, speed. the oxide line width also tends to vary with the same law. the ambient humidity and the afm tip state can remarkably influence this process, too. as compared with traditional octadecylsilated sio2/si substrate, such a substrate can guarantee the spo with an obviously lowered voltage and a greatly increased writing speed. this study demonstrates that such alkylated silicon is a promising silicon-based substrate material for spo nanolithography. |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000234959200059 |
| 公开日期 | 2010-08-17 |
| 源URL | [http://ir.ciac.jl.cn/handle/322003/16181]  |
| 专题 | 长春应用化学研究所_长春应用化学研究所知识产出_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yang ML,Zheng ZK,Liu YQ,et al. Scanned probe oxidation on an octadecyl-terminated silicon (111) surface with an atomic force microscope: kinetic investigations in line patterning[J]. nanotechnology,2006,17(1):330-337. |
| APA | Yang ML,Zheng ZK,Liu YQ,&Zhang BL.(2006).Scanned probe oxidation on an octadecyl-terminated silicon (111) surface with an atomic force microscope: kinetic investigations in line patterning.nanotechnology,17(1),330-337. |
| MLA | Yang ML,et al."Scanned probe oxidation on an octadecyl-terminated silicon (111) surface with an atomic force microscope: kinetic investigations in line patterning".nanotechnology 17.1(2006):330-337. |
入库方式： OAI收割
来源：长春应用化学研究所
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