Embossing of polymers using a thermosetting polymer mold made by soft lithography
文献类型：期刊论文
| 作者 | Xing R ; Wang Z ; Han YC |
| 刊名 | journal of vacuum science & technology b
 |
| 出版日期 | 2003 |
| 卷号 | 21期号:4页码:1318-1322 |
| 关键词 | NANOIMPRINT LITHOGRAPHY REPLICATION RESOLUTION IMPRINT |
| ISSN号 | 1071-1023 |
| 通讯作者 | han yc |
| 中文摘要 | in this article we present a mechanical pattern transfer process where a thermosetting polymer mold instead of a metal, dielectric, ceramic, or semiconductor master made by conventional lithography was used as the master to pattern thermoplastic polymers in hot embossing lithography. the thermosetting polymer mold was fabricated by a soft lithography strategy, microtransfer molding. for comparison, the thermosetting polymer mold and the silicon wafer master were both used to imprint the thermoplastic polymer, polymethylmethacrylate. replication of the thermosetting polymer mold and the silicon wafer master was of the same quality. this indicates that the thermosetting polymer mold could be used for thermoplastic polymer patterning in hot embossing lithography with high fidelity. |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000185080000023 |
| 公开日期 | 2010-09-13 |
| 源URL | [http://202.98.16.49/handle/322003/17429]  |
| 专题 | 长春应用化学研究所_长春应用化学研究所知识产出_期刊论文 |
| 推荐引用方式 GB/T 7714 | Xing R,Wang Z,Han YC. Embossing of polymers using a thermosetting polymer mold made by soft lithography[J]. journal of vacuum science & technology b,2003,21(4):1318-1322. |
| APA | Xing R,Wang Z,&Han YC.(2003).Embossing of polymers using a thermosetting polymer mold made by soft lithography.journal of vacuum science & technology b,21(4),1318-1322. |
| MLA | Xing R,et al."Embossing of polymers using a thermosetting polymer mold made by soft lithography".journal of vacuum science & technology b 21.4(2003):1318-1322. |
入库方式： OAI收割
来源：长春应用化学研究所
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