Stability of Mo/Si multilayer structure used in Bragg-Fresnel optics
文献类型：期刊论文
| 作者 | Le ZC ; Cao JL ; Liang JQ ; Pei S ; Yao JS ; Cui CJ |
| 刊名 | chinese physics letters
 |
| 出版日期 | 1998 |
| 卷号 | 15期号:7页码:522-524 |
| 关键词 | FILMS |
| ISSN号 | 0256-307x |
| 通讯作者 | le zc |
| 中文摘要 | the thermal and chemical stabilities of mo/si multilayer structure used in bragg-fresnel optics were studied to get optimal technological parameters of pattern generation. mo/si multilayers were annealed at temperature ranging from 360 to 770 k, treated with acetone and 5 parts per thousand naoh solution, and characterized by small-angle x-ray diffraction technique as well as x-ray photoelectron spectroscopy, and olympus microscopy. |
| 收录类别 | SCI收录期刊论文 |
| 语种 | 英语 |
| WOS记录号 | WOS:000075541400019 |
| 公开日期 | 2010-11-04 |
| 源URL | [http://202.98.16.49/handle/322003/22769]  |
| 专题 | 长春应用化学研究所_长春应用化学研究所知识产出_期刊论文 |
| 推荐引用方式 GB/T 7714 | Le ZC,Cao JL,Liang JQ,et al. Stability of Mo/Si multilayer structure used in Bragg-Fresnel optics[J]. chinese physics letters,1998,15(7):522-524. |
| APA | Le ZC,Cao JL,Liang JQ,Pei S,Yao JS,&Cui CJ.(1998).Stability of Mo/Si multilayer structure used in Bragg-Fresnel optics.chinese physics letters,15(7),522-524. |
| MLA | Le ZC,et al."Stability of Mo/Si multilayer structure used in Bragg-Fresnel optics".chinese physics letters 15.7(1998):522-524. |
入库方式： OAI收割
来源：长春应用化学研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。