Surface roughness characterization of soft x-ray multilayer films on the nanometer scale
文献类型：期刊论文
| 作者 | Yu J ; Cao JL ; Namba Y ; Ma YY |
| 刊名 | journal of vacuum science & technology b
 |
| 出版日期 | 1996 |
| 卷号 | 14期号:1页码:42-47 |
| 关键词 | DOUBLE-PASS AMPLIFICATION MIRRORS LASER |
| ISSN号 | 1071-1023 |
| 通讯作者 | yu j |
| 中文摘要 | the soft x-ray reflectivity of multilayer films is affected by the surface roughness on the transverse nanometer scale. scanning tunneling microscopy (stm) is an ideal instrument for providing high-lateral-resolution roughness measurements for soft x-ray multilayer films that cannot be obtained with other types of instruments on the transverse nanometer scale. the surface roughnesses of mo/si, mo/c, and w/si soft x-ray multilayer films prepared by an ion-beam-sputtering technique were measured with a stm on the vertical and transverse attributes. the film roughnesses and average spatial wavelengths added to the substrates depend on the multilayer film fabrication conditions, i.e., material combinations, number of layers, and individual layer thickness. these were estimated to lead to a loss of specular reflectivity and variations of the soft x-ray scattering angle distribution. this method points the way to further studies of soft x-ray multilayer film functional properties and can be used as basic guidance for selecting the best coating conditions in the fabrications of soft x-ray multilayer films. (c) 1996 american vacuum society. |
| 收录类别 | SCI收录期刊论文 |
| 语种 | 英语 |
| 公开日期 | 2010-12-22 ; 2011-06-09 |
| 源URL | [http://ir.ciac.jl.cn/handle/322003/25585]  |
| 专题 | 长春应用化学研究所_长春应用化学研究所知识产出_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yu J,Cao JL,Namba Y,et al. Surface roughness characterization of soft x-ray multilayer films on the nanometer scale[J]. journal of vacuum science & technology b,1996,14(1):42-47. |
| APA | Yu J,Cao JL,Namba Y,&Ma YY.(1996).Surface roughness characterization of soft x-ray multilayer films on the nanometer scale.journal of vacuum science & technology b,14(1),42-47. |
| MLA | Yu J,et al."Surface roughness characterization of soft x-ray multilayer films on the nanometer scale".journal of vacuum science & technology b 14.1(1996):42-47. |
入库方式： OAI收割
来源：长春应用化学研究所
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