Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications
文献类型:期刊论文
作者 | Cheng, Ya |
刊名 | Micromachines |
出版日期 | 2017 |
卷号 | 8期号:2 |
通讯作者 | ycheng@phy.ecnu.edu.cn |
英文摘要 | Femtosecond laser direct writing is unique in allowing for fabrication of 3D micro- and nanofluidic structures, thereby enabling rapid and efficient manipulation of fluidic dynamics in 3D space to realize innovative functionalities. Here, I discuss the challenges in producing fully functional and highly integrated 3D micro- and nanofluidic systems with potential applications ranging from chemical and biological analyses to investigations of nanofluidic behaviors. In particular, I review the achievements we have made in the past decade, which have led to 3D microchannels with controllable cross-sectional profiles and large aspect ratios, 3D nanofluidic channels with widths of several tens of nanometers, and smooth inner walls with roughness on the order of similar to 1 nm. Integration of the microfluidics with other functional microcomponents including microoptics and microelectrodes will also be discussed, followed by conclusions and the future perspective. |
资助信息 | National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] |
收录类别 | SCI |
WOS记录号 | WOS:000395476000029 |
源URL | [http://ir.siom.ac.cn/handle/181231/27660] |
专题 | 上海光学精密机械研究所_强场激光物理国家重点实验室 |
作者单位 | 中国科学院上海光学精密机械研究所 |
推荐引用方式 GB/T 7714 | Cheng, Ya. Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications[J]. Micromachines,2017,8(2). |
APA | Cheng, Ya.(2017).Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications.Micromachines,8(2). |
MLA | Cheng, Ya."Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications".Micromachines 8.2(2017). |
入库方式: OAI收割
来源:上海光学精密机械研究所
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