Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing
文献类型：期刊论文
| 作者 | Fang, Wei; Cheng, Ya; Wang, Min; Qiao, Lingling; Xu, Yingxin; Fang, Zhiwei; Lin, Jintian |
| 刊名 | Sci Rep
 |
| 出版日期 | 2017 |
| 卷号 | 7 |
| 通讯作者 | jintianlin@siom.ac.cn ; wfang08@zju.edu.cn ; ya.cheng@siom.ac.cn |
| 英文摘要 | We demonstrated integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67 x 10(5). |
| 收录类别 | SCI |
| 资助信息 | National Basic Research Program of China (Program 973) [2014CB921300]; Natural National Science Foundation of China (NSFC) [61505231, 61405220, 61327902, 61590934]; Fundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] |
| WOS记录号 | WOS:000398952300001 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/27680]  |
| 专题 | 上海光学精密机械研究所_强场激光物理国家重点实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Fang, Wei,Cheng, Ya,Wang, Min,et al. Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing[J]. Sci Rep,2017,7. |
| APA | Fang, Wei.,Cheng, Ya.,Wang, Min.,Qiao, Lingling.,Xu, Yingxin.,...&Lin, Jintian.(2017).Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing.Sci Rep,7. |
| MLA | Fang, Wei,et al."Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing".Sci Rep 7(2017). |
入库方式： OAI收割
来源：上海光学精密机械研究所
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