Polarization effects in femtosecond laser induced amorphization of monocrystalline silicon
文献类型：期刊论文
| 作者 | Zhao, Quan-Zhong; Bai, Feng; Li, Hong-Jin; Huang, Yuan-Yuan; Fan, Wen-Zhong; Pan, Huai-Hai; Wang, Zhuo; Wang, Cheng-Wei; Qian, Jing; Li, Yang-Bo |
| 刊名 | Chem. Phys. Lett.
 |
| 出版日期 | 2016 |
| 卷号 | 662页码:102 |
| 通讯作者 | zqz@siom.ac.cn |
| 英文摘要 | We have used femtosecond laser pulses to ablate monocrystalline silicon wafer. Raman spectroscopy and X-ray diffraction analysis of ablation surface indicates horizontally polarized laser beam shows an enhancement in amorphization efficiency by a factor of 1.6-1.7 over the circularly polarized laser ablation. This demonstrates that one can tune the amorphization efficiency through the polarization of irradiation laser. (C) 2016 Elsevier B.V. All rights reserved. |
| 资助信息 | National Natural Science Foundation of China [61178024, 11374316] |
| 收录类别 | SCI |
| WOS记录号 | WOS:000386860900018 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/27703]  |
| 专题 | 上海光学精密机械研究所_强场激光物理国家重点实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Zhao, Quan-Zhong,Bai, Feng,Li, Hong-Jin,et al. Polarization effects in femtosecond laser induced amorphization of monocrystalline silicon[J]. Chem. Phys. Lett.,2016,662:102. |
| APA | Zhao, Quan-Zhong.,Bai, Feng.,Li, Hong-Jin.,Huang, Yuan-Yuan.,Fan, Wen-Zhong.,...&Li, Yang-Bo.(2016).Polarization effects in femtosecond laser induced amorphization of monocrystalline silicon.Chem. Phys. Lett.,662,102. |
| MLA | Zhao, Quan-Zhong,et al."Polarization effects in femtosecond laser induced amorphization of monocrystalline silicon".Chem. Phys. Lett. 662(2016):102. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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