High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions
文献类型：期刊论文
| 作者 | Cheng, Ya; Qiao, Lingling; Tan, Yuanxin; Wang, Zhaohui; Chu, Wei; Liao, Yang |
| 刊名 | Opt. Mater. Express
 |
| 出版日期 | 2016 |
| 卷号 | 6期号:12页码:3787 |
| 通讯作者 | ya.cheng@siom.ac.cn |
| 英文摘要 | We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of similar to 100 mu m. (C) 2016 Optical Society of America |
| 资助信息 | National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences |
| 收录类别 | SCI |
| WOS记录号 | WOS:000390408500011 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/28640]  |
| 专题 | 上海光学精密机械研究所_强场激光物理国家重点实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Cheng, Ya,Qiao, Lingling,Tan, Yuanxin,et al. High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions[J]. Opt. Mater. Express,2016,6(12):3787. |
| APA | Cheng, Ya,Qiao, Lingling,Tan, Yuanxin,Wang, Zhaohui,Chu, Wei,&Liao, Yang.(2016).High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions.Opt. Mater. Express,6(12),3787. |
| MLA | Cheng, Ya,et al."High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions".Opt. Mater. Express 6.12(2016):3787. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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