A Novel Method about Online Monitoring Surface Shape of Optical Elements in Continuous Polishing
文献类型：会议论文
| 作者 | Yin Jin; Zhu Jianqiang; Jiao Xiang; Wu Yongzhong |
| 出版日期 | 2016 |
| 英文摘要 | In conventional continuous polishing process, the surface shape of work-piece was measured by an optical plane template after being placed in such environment with constant temperature for 1 to 2 hours. During this period, uncertain influence may occur on the polishing pad due to the change of system state. Meanwhile, the regular off-line testing may cause re-processing. In this paper, a new method about on-line monitoring surface shape of optical elements is proposed by the theory of run-sphere, and the change in curvature radius of the work-piece which lead to its radial tilt angle change. The change in work-piece surface shape indirectly obtain by the correction plate small angle with respect to the horizontal, and the angle were detected on line by the high-precision goniometer with the resolution 0.04 ''. According to theoretical calculations, the diameter of 200mm precision work-piece PV value up to 0.02 lambda (lambda = 632.8nm). The fused quartz glass was measured by above method. The test results showed that the surface accuracy and processing efficiency were significantly promoted, and also improving the controllability of surface shape of work-piece based on this method. |
| 会议录 | ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES
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| 语种 | 英语 |
| ISSN号 | 0277-786X |
| 源URL | [http://ir.siom.ac.cn/handle/181231/27382]  |
| 专题 | 上海光学精密机械研究所_高功率激光物理国家实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Yin Jin,Zhu Jianqiang,Jiao Xiang,et al. A Novel Method about Online Monitoring Surface Shape of Optical Elements in Continuous Polishing[C]. 见:. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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