A study on one-step laser nanopatterning onto copper-hydrazone-complex thin films and its mechanism
文献类型：期刊论文
| 作者 | Zhang, Kui; Chen, Zhimin; Wei, Jingsong; Wei, Tao; Geng, Youyong; Wang, Yang; Wu, Yiqun |
| 刊名 | Phys. Chem. Chem. Phys.
 |
| 出版日期 | 2017 |
| 卷号 | 19期号:20页码:13272 |
| 通讯作者 | weijingsong@siom.ac.cn ; yqwu@siom.ac.cn |
| 英文摘要 | Semiconductor diode-based laser patterning with visible light has been extensively applied to the fabrication of arbitrary structures. However, recently, the technique has faced a great challenge because it cannot meet nanoscale-resolved patterning fabrication due to the optical diffraction limit, which is an inherent drawback in the field of optics. To attack the question, copper(II)-hydrazone-complex (CuL2) thin films are used as laser patterning materials. Under the heating of a writing laser spot, one-step laser nanopatterning on the CuL2 thin films is obtained. The convex-type and concave-type pattern structures are directly written without wet-etching and developing processes. The minimum pattern feature size is about 31 nm, which is far smaller than the diffraction limit and only similar to 1/20 the writing spot size. Analysis indicates that the laser nanopatterning originates from obvious photothermal localization responses to the writing spot. Compared with common organic resists, the exposure dose of CuL2 is several orders higher than that of the polymer; thus CuL2 thin film materials are suitable for maskless direct laser writing lithography. This work also provides an effective method for one-step nanopatternings through diode-based laser writing at visible light wavelengths. |
| 收录类别 | SCI |
| 资助信息 | National Natural Science Foundation of China [51672292, 61627826, 61137002] |
| WOS记录号 | WOS:000402072100071 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/28227]  |
| 专题 | 上海光学精密机械研究所_高密度光存储技术实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Zhang, Kui,Chen, Zhimin,Wei, Jingsong,et al. A study on one-step laser nanopatterning onto copper-hydrazone-complex thin films and its mechanism[J]. Phys. Chem. Chem. Phys.,2017,19(20):13272. |
| APA | Zhang, Kui.,Chen, Zhimin.,Wei, Jingsong.,Wei, Tao.,Geng, Youyong.,...&Wu, Yiqun.(2017).A study on one-step laser nanopatterning onto copper-hydrazone-complex thin films and its mechanism.Phys. Chem. Chem. Phys.,19(20),13272. |
| MLA | Zhang, Kui,et al."A study on one-step laser nanopatterning onto copper-hydrazone-complex thin films and its mechanism".Phys. Chem. Chem. Phys. 19.20(2017):13272. |
入库方式： OAI收割
来源：上海光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。