Movement flatness error measurement based on an astigmatic method
文献类型：期刊论文
| 作者 | Liang, Xin; Bai, Zhen; Wei, Jingsong |
| 刊名 | Appl. Optics
 |
| 出版日期 | 2017 |
| 卷号 | 56期号:15页码:4347 |
| 通讯作者 | weijingsong@siom.ac.cn |
| 英文摘要 | The movement flatness error is one of the critical parameters of motorized stage performance. In this work, the measurement of the movement flatness error based on an astigmatic method is proposed, in which the focus error signal is detected and used to analyze the movement flatness error. The theoretical derivation and analysis are presented, and the experimental system is established accordingly. The experimental results indicate that our measurement method and established system exhibit an accuracy of less than +/- 100 nm. The movement flatness error of an x-y stepping motorized stage is measured using the established system, and the movement flatness error profile is mapped; it is determined that the maximum movement flatness error is within 1.3 mu m in our experiment. The proposed method is hence proven to be an effective way of measuring the movement flatness error of motorized stages. (C) 2017 Optical Society of America |
| 收录类别 | SCI |
| 资助信息 | National Natural Science Foundation of China (NSFC) [51672292, 61627826] |
| WOS记录号 | WOS:000401839000018 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/28243]  |
| 专题 | 上海光学精密机械研究所_高密度光存储技术实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Liang, Xin,Bai, Zhen,Wei, Jingsong. Movement flatness error measurement based on an astigmatic method[J]. Appl. Optics,2017,56(15):4347. |
| APA | Liang, Xin,Bai, Zhen,&Wei, Jingsong.(2017).Movement flatness error measurement based on an astigmatic method.Appl. Optics,56(15),4347. |
| MLA | Liang, Xin,et al."Movement flatness error measurement based on an astigmatic method".Appl. Optics 56.15(2017):4347. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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