Super resolution nano-information recording in a new hydrazone metal complex material
文献类型：会议论文
| 作者 | Zhang, Kui; Wei, Jingsong; Chen, Zhimin; Wei, Tao; Geng, Yongyou; Wang, Yang; Wu, Yiqun |
| 出版日期 | 2016 |
| 通讯作者 | yqwu@siom.ac.cn |
| 英文摘要 | Laser thermal lithography has been proposed for a few years, which has the advantages of breaking through the optical diffraction limit, operation in far-field and in air, and low production cost. In this paper, a new hydrazone metal complexe is used as the laser thermal lithography material due to its feature of the one-step fabrication of micro/nano structure without mask and wet-etching process. Based on the laser thermal lithography method, super resolution nano-information pits are directly written on the surface of hydrazone metal complexe thin films. Pits with a minimum feature size of about 79 nm are successfully obtained, which is only about 1/7 of the writing spot size. Moreover, the reactive ion etching method can be applied to transfer the pits onto a silica substrate. These results suggest the potential applications of the new material in high density optical data storage and semiconductor industries. |
| 会议录 | 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage
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| 语种 | 英语 |
| ISSN号 | 0277-786X |
| 源URL | [http://ir.siom.ac.cn/handle/181231/27427]  |
| 专题 | 上海光学精密机械研究所_高密度光存储技术实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Zhang, Kui,Wei, Jingsong,Chen, Zhimin,et al. Super resolution nano-information recording in a new hydrazone metal complex material[C]. 见:. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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