High-density grating pair for displacement measurement
文献类型：会议论文
| 作者 | Zhou, Changhe; Sun, Zhumei; Li, Shubin; Xiang, Changcheng |
| 出版日期 | 2017 |
| 英文摘要 | A novel method of displacement measurement based on a high density grating pair is proposed. When a laser beam is incident normal to a closely placed high density grating pair, efficiencies of transmission diffraction orders will change periodically along with the relative displacement of the two gratings in the grating period direction. The period of efficiency changing is equal to the grating period, thus measurement of displacement in the grating period direction can be achieved by detecting the power of diffraction orders. |
| 会议录 | HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VII
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| 语种 | 英语 |
| ISSN号 | 0277-786X |
| 源URL | [http://ir.siom.ac.cn/handle/181231/27345]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 推荐引用方式 GB/T 7714 | Zhou, Changhe,Sun, Zhumei,Li, Shubin,et al. High-density grating pair for displacement measurement[C]. 见:. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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