Research of Absolute Testing based on N-position Rotations
文献类型：会议论文
| 作者 | Gao, Wanrong; Liu, Huanhuan; Liu, Shijie; Fang, Qiaoran |
| 出版日期 | 2016 |
| 通讯作者 | happyliu0730@163.com |
| 英文摘要 | The full-aperture and full-frequency absolute surfaces of optical flats are of great significant for industrial applications but hard to achieve. To measure them simultaneously, Kuechel proposed an absolute testing based on N-position rotations by adding a set of measurement data of N-position rotations, in comparison to the traditional four measurements. Algorithm simulation and absolute detection experiments have been conducted before, however, the influence of rotation angle error has not been analyzed, and the full-aperture contrast experiments have not been conducted. In this paper, the influence of rotation angle error was analyzed, and the measurement result is within acceptable range even when the angle error reaches 1 degrees. Moreover, to verify the accuracy of this method, full-aperture contrast experiments were proposed innovatively besides the two linear profiles contrast experiments. The contrast experiments prove the accuracy of the full-aperture absolute measured results, other than the accuracy of the two linear profiles results. |
| 会议录 | SELECTED PAPERS OF THE PHOTOELECTRONIC TECHNOLOGY COMMITTEE CONFERENCES HELD NOVEMBER 2015
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| 语种 | 英语 |
| ISSN号 | 0277-786X |
| 源URL | [http://ir.siom.ac.cn/handle/181231/27406]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Gao, Wanrong,Liu, Huanhuan,Liu, Shijie,et al. Research of Absolute Testing based on N-position Rotations[C]. 见:. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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