中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Research of Absolute Testing based on N-position Rotations

文献类型:会议论文

作者Gao, Wanrong; Liu, Huanhuan; Liu, Shijie; Fang, Qiaoran
出版日期2016
通讯作者happyliu0730@163.com
英文摘要The full-aperture and full-frequency absolute surfaces of optical flats are of great significant for industrial applications but hard to achieve. To measure them simultaneously, Kuechel proposed an absolute testing based on N-position rotations by adding a set of measurement data of N-position rotations, in comparison to the traditional four measurements. Algorithm simulation and absolute detection experiments have been conducted before, however, the influence of rotation angle error has not been analyzed, and the full-aperture contrast experiments have not been conducted. In this paper, the influence of rotation angle error was analyzed, and the measurement result is within acceptable range even when the angle error reaches 1 degrees. Moreover, to verify the accuracy of this method, full-aperture contrast experiments were proposed innovatively besides the two linear profiles contrast experiments. The contrast experiments prove the accuracy of the full-aperture absolute measured results, other than the accuracy of the two linear profiles results.
会议录SELECTED PAPERS OF THE PHOTOELECTRONIC TECHNOLOGY COMMITTEE CONFERENCES HELD NOVEMBER 2015
语种英语
ISSN号0277-786X
源URL[http://ir.siom.ac.cn/handle/181231/27406]  
专题上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Gao, Wanrong,Liu, Huanhuan,Liu, Shijie,et al. Research of Absolute Testing based on N-position Rotations[C]. 见:.

入库方式: OAI收割

来源:上海光学精密机械研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。