Imaging ellipsometer with large field of view
文献类型：会议论文
| 作者 | Gu, Liyuan; Huang, Huijie; He, Hongbo; Zeng, Aijun; Hu, Shiyu; Yuan, Qiao; Cheng, Weilin; Zhang, Shanhua; Hu, Guohang |
| 出版日期 | 2016 |
| 通讯作者 | aijunzeng@siom.ac.cn |
| 英文摘要 | A polarizer-compensator- sample-analyzer (PCSA) imaging ellipsometer with large field of view is presented. The sample is imaged on a CCD sensor by a telecentric imaging system and its tilt is monitored by an optical autocollimator. The sample, the telecentric imaging system and the CCD sensor satisfy the Scheimpflug condition. In measurement, the light extinction measurement method and the four quadrants average method are used to improve the accuracy. In experiments, a chromium thin film sample is measured by the imaging ellipsometer and a spectroscopic ellipsometer. The measurement results by two ellipsometers are consistent. The usefulness of the imaging ellipsometer is verified. |
| 会议录 | OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS IV
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| 语种 | 英语 |
| ISSN号 | 0277-786X |
| 源URL | [http://ir.siom.ac.cn/handle/181231/27456]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Gu, Liyuan,Huang, Huijie,He, Hongbo,et al. Imaging ellipsometer with large field of view[C]. 见:. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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