Aberration Measurement Method for Hyper-NA Lithographic Projection Lens
文献类型：期刊论文
| 作者 | Li SK(李思坤); Wang XC(王向朝); Zhu BE(诸波尔); Duan LF(段立峰); Shen LN(沈丽娜); Yan GY(闫观勇) |
| 刊名 | 光学学报
 |
| 出版日期 | 2016 |
| 卷号 | 36期号:1页码:112002 |
| 通讯作者 | zhuboer@126.com ; wxz26267@siom.ac.cn |
| 中文摘要 | 提出了一种基于空间像主成分分析的超大数值孔径光刻机投影物镜波像差检测方法。通过采用偏振光照明和矢量光刻成像模型并考虑投影物镜的偏振像差,准确表征了超大数值孔径光刻机的空间像,从而提高了像差检测模型的精度,实现了超大数值孔径光刻机投影物镜33项泽尼克像差(Z_5~Z_(37))的高精度检测。相比于原基于空间像主成分分析的投影物镜成像差检测技术(AMAI-PCA)方法,所提方法适用于超大数值孔径光刻机投影物镜波像差检测。采用光刻仿真软件PROLITH对所提方法的检测精度进行了仿真验证,并分析了空间像采样间隔对 |
| 英文摘要 | An aberration measurement method for hyper-NA lithographic projection lens by use of aerial image based on principal component analysis is proposed. Aerial images of the hyper-NA lithographic projection lens are expressed accurately by using polarized light and vector imaging model, as well as considering the polarization properties. As a result, the accuracy of the measurement model is improved and the aberrations of hyper- NA lithographic projection lens are measured accurately. Compared with the conventional AMAI-PCA method, the proposed method is applicable for the hyper-NA lithographic projection lens. The lithographic simulator PROLITH is used to validate the accuracies of aberration measurement and analyze the impacts of the sample interval of aerial images on the accuracy of the aberration measurement. The result shows that the proposed method can retrieve 33 terms of Zernike coefficients (Z_5~Z_(37)) with maximum error less than 0.85*10~(-3)lambda. |
| 收录类别 | CSCD |
| 资助信息 | 国家自然科学基金 |
| WOS记录号 | CSCD:5710780 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/27483]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Li SK,Wang XC,Zhu BE,et al. Aberration Measurement Method for Hyper-NA Lithographic Projection Lens[J]. 光学学报,2016,36(1):112002. |
| APA | 李思坤,王向朝,诸波尔,段立峰,沈丽娜,&闫观勇.(2016).Aberration Measurement Method for Hyper-NA Lithographic Projection Lens.光学学报,36(1),112002. |
| MLA | 李思坤,et al."Aberration Measurement Method for Hyper-NA Lithographic Projection Lens".光学学报 36.1(2016):112002. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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