Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask
文献类型：期刊论文
| 作者 | Yan GY(闫观勇); Shen LN(沈丽娜); Wang XC(王向朝); Li SK(李思坤); Zhu BE(诸波尔); Meng ZJ(孟泽江); Zhang H(张恒) |
| 刊名 | 光学学报
 |
| 出版日期 | 2016 |
| 卷号 | 36期号:8页码:811003 |
| 通讯作者 | shenlina@siom.ac.cn ; wxz26267@siom.ac.cn |
| 中文摘要 | 提出一种基于交替相移掩模空间像的光刻机投影物镜偏振像差检测方法。采用泡利-泽尼克系数表征偏振像差,结合X和Y两种线性偏振照明方式,用像传感器测量不同照明条件下掩模空间像的成像位置偏移与最佳焦面偏移,利用标定的偏振像差灵敏度矩阵计算获得泡利-泽尼克系数。采用光刻仿真软件对本文方法的有效性进行了验证,结果表明其检测精度优于3.07 mlambda。 |
| 英文摘要 | A measuring method of polarization aberration based on aerial image of alternating phase-shift mask is proposed.The polarization aberration is represented by Pauli-Zernike coefficients.The image placement error and best focus shift are measured by image sensor at multiple illumination settings,combined with X and Ylinearly polarized illuminating light.The Pauli-Zernike coefficients are retrieved using the calibrated sensitivity matrix of polarization aberration.The validity of this proposed method is verified by numerical simulations,and the results indicate that the measuring accuracy is less than 3.07 mlambda. |
| 收录类别 | CSCD |
| 资助信息 | 国家自然科学基金 |
| CSCD记录号 | CSCD:5777799 |
| WOS记录号 | CSCD:5777799 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/27516]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Yan GY,Shen LN,Wang XC,et al. Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask[J]. 光学学报,2016,36(8):811003. |
| APA | 闫观勇.,沈丽娜.,王向朝.,李思坤.,诸波尔.,...&张恒.(2016).Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask.光学学报,36(8),811003. |
| MLA | 闫观勇,et al."Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask".光学学报 36.8(2016):811003. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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