Pitch evaluation of gratings based on a digital image correlation technique
文献类型：期刊论文
| 作者 | Li, Shubin; Qiu, Jucheng; Wang, Shaoqing; Zhou, Changhe; Lu, Yancong; Jia, Wei; Wei, Chunlong; Yu, Junjie; Li, Yanyang; Li, Minkang |
| 刊名 | Opt. Commun.
 |
| 出版日期 | 2016 |
| 卷号 | 365页码:68 |
| 通讯作者 | chazhou@mail.shcnc.ac.cn |
| 英文摘要 | The digital image correlation (DIC) technique used for metrological grating evaluation is presented in this paper. A CCD camera is used to acquire the grating image, and the DIC technique together with the peak position detection method is used to evaluate the grating pitches. The theoretical analysis and simulations are performed to confirm that the performance of our technique is as accurate as the Fourier transform (Fr) technique, and is capable of noise resistance. As an example, the uniformity of the grating fabricated in our laboratory is measured using this method. The experimental results show that this grating has a peak-to-valley uniformity of 48 nm during a long range of 35 mm, and our technique has a higher repeatability than the FT technique in our measurement strategy. This work should be of great significance for the evaluation of metrological grating for optical encoders. (C) 2015 Elsevier B.V. All rights reserved. |
| 收录类别 | SCI |
| 资助信息 | National Science Foundation (NSF) [61127013, 61405214, 61308073] |
| WOS记录号 | WOS:000369233100012 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/27528]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Li, Shubin,Qiu, Jucheng,Wang, Shaoqing,et al. Pitch evaluation of gratings based on a digital image correlation technique[J]. Opt. Commun.,2016,365:68. |
| APA | Li, Shubin.,Qiu, Jucheng.,Wang, Shaoqing.,Zhou, Changhe.,Lu, Yancong.,...&Li, Minkang.(2016).Pitch evaluation of gratings based on a digital image correlation technique.Opt. Commun.,365,68. |
| MLA | Li, Shubin,et al."Pitch evaluation of gratings based on a digital image correlation technique".Opt. Commun. 365(2016):68. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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