Alteration of titanium dioxide material properties by glancing angle deposition plus annealing treatment
文献类型:期刊论文
作者 | Pan, Mingyan; Shao, Jianda; Cui, Yun; Wang, Hu; Guo, Meng; Li, Meng; Chai, Yingjie; Qi, Hongji; Wang, Bin |
刊名 | Superlattices Microstruct.
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出版日期 | 2016 |
卷号 | 90页码:87 |
通讯作者 | qhj@siom.ac.cn |
英文摘要 | Titanium dioxide (TiO2) nanostructured thin film (TNF), as an important semiconductor exhibiting large surface-to-volume ratio and unique property, has attracted more and more researches. As an important versatile nanofabrication technique, the glancing angle deposition technique (GLAD) is used to fabricate the TNF, frequently. However, little is known about the influence of GLAD on microstructure, crystalline structure, Ti/O chemical state and photoluminescence (PL) properties of TiO2 thin films. In this paper, pure anatase TNF and traditional TiO2 thin film (TTF) were deposited by combining GLAD system with the annealing treatment. All of the prepared TNFs keep discrete nanoscale columnar structures characterized by SEM. The evolution of morphology, crystallization structure, Ti/O chemical state and PL properties of TNFs and TTFs under annealing treatment have been investigated in detail. Simultaneously, comparing with TTFs, the influence of GLAD on TNFs material properties has been analyzed further. With the optimum annealing temperature (400 degrees C), one can obtain fine nanostructures and pure anatase precipitation of TNFs. The GLAD technique can adjust the preferred crystal orientation of TiO2 thin films, which can be used as a method of material structural design. Both TNFs and TTFs exhibit broad band (380-700 nm) photoluminescence. Nevertheless, the TNFs exhibit much weaker and smoother PL spectra than that of TTFs, due to the large surface-to-volume ratio. The results indicate the potential good catalytic applications of TNFs deposited by GLAD. (C) 2015 Elsevier Ltd. All rights reserved. |
收录类别 | SCI |
资助信息 | National Natural Science Foundation of China [6120521]; State Key Program of National Natural Science of China [11535010] |
WOS记录号 | WOS:000370312800010 |
源URL | [http://ir.siom.ac.cn/handle/181231/28024] ![]() |
专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
作者单位 | 中国科学院上海光学精密机械研究所 |
推荐引用方式 GB/T 7714 | Pan, Mingyan,Shao, Jianda,Cui, Yun,et al. Alteration of titanium dioxide material properties by glancing angle deposition plus annealing treatment[J]. Superlattices Microstruct.,2016,90:87. |
APA | Pan, Mingyan.,Shao, Jianda.,Cui, Yun.,Wang, Hu.,Guo, Meng.,...&Wang, Bin.(2016).Alteration of titanium dioxide material properties by glancing angle deposition plus annealing treatment.Superlattices Microstruct.,90,87. |
MLA | Pan, Mingyan,et al."Alteration of titanium dioxide material properties by glancing angle deposition plus annealing treatment".Superlattices Microstruct. 90(2016):87. |
入库方式: OAI收割
来源:上海光学精密机械研究所
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