Effects of annealing time on the structure, morphology, and stress of gold-chromium bilayer film
文献类型：期刊论文
| 作者 | Kong FY(孔钒宇); Huang HP(黄昊鹏); Cui Y(崔云); Zhang H(张洪); Jin YX(晋云霞); Wang H(王虎) |
| 刊名 | Chin. Phys. B
 |
| 出版日期 | 2016 |
| 卷号 | 25期号:10 |
| 通讯作者 | yxjin@siom.ac.cn |
| 英文摘要 | In this work, a 200-nm-thick gold film with a 10-nm-thick chromium layer used as an adhesive layer is fabricated on fused silica by the electron beam evaporation method. The effects of annealing time at 300 degrees C on the structure, morphology and stress of the film are studied. We find that chromium could diffuse to the surface of the film by formatting a solid solution with gold during annealing. Meanwhile, chromium is oxidized on the surface and diffused downward along the grain grooves in the gold film. The various operant mechanisms that change the residual stresses of gold films for different annealing times are discussed. |
| 资助信息 | National Natural Science Foundation of China [61405225] |
| 收录类别 | SCI |
| WOS记录号 | WOS:000384227700024 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/28058]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Kong FY,Huang HP,Cui Y,et al. Effects of annealing time on the structure, morphology, and stress of gold-chromium bilayer film[J]. Chin. Phys. B,2016,25(10). |
| APA | 孔钒宇,黄昊鹏,崔云,张洪,晋云霞,&王虎.(2016).Effects of annealing time on the structure, morphology, and stress of gold-chromium bilayer film.Chin. Phys. B,25(10). |
| MLA | 孔钒宇,et al."Effects of annealing time on the structure, morphology, and stress of gold-chromium bilayer film".Chin. Phys. B 25.10(2016). |
入库方式： OAI收割
来源：上海光学精密机械研究所
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