Improving the laser-induced damage threshold of 532-nm antireflection coating using plasma ion cleaning
文献类型：期刊论文
| 作者 | Zhu, Meiping; Xing, Huanbin; Chai, Yingjie; Shao, Jianda; Yi, Kui; Sun, Jian; Wang, Jianguo |
| 刊名 | Opt. Eng.
 |
| 出版日期 | 2017 |
| 卷号 | 56期号:1 |
| 通讯作者 | bree@siom.ac.an ; jdshao@siom.ac.cn |
| 英文摘要 | BK7 glass substrates were precleaned by different cleaning procedures before being loaded into a vacuum chamber, and then a series of plasma ion cleaning procedures were conducted at different bias voltages in the vacuum chamber, prior to the deposition of 532-nm antireflection (AR) coatings. The plasma ion cleaning process was implemented by the plasma ion bombardment from an advanced plasma source. The surface morphology of the plasma ion-cleaned substrate, as well as the laser-induced damage threshold (LIDT) of the 532-nm AR coating was investigated. The results indicated that the LIDT of 532-nm AR coating can be greatly influenced by the plasma ion cleaning energy. The plasma ion cleaning with lower energy is an attractive method to improve the LIDT of the 532-nm AR coating, due to the removal of the adsorbed contaminations on the substrate surface, as well as the removal of part of the chemical impurities hidden in the surface layer. (C) 2016 Society of Photo-Optical Instrumentation Engineers (SPIE) |
| 收录类别 | SCI |
| 资助信息 | National Science Foundation of China [61505227]; Youth Innovation Promotion Association of the Chinese Academy of Sciences |
| WOS记录号 | WOS:000396389400006 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/28107]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Zhu, Meiping,Xing, Huanbin,Chai, Yingjie,et al. Improving the laser-induced damage threshold of 532-nm antireflection coating using plasma ion cleaning[J]. Opt. Eng.,2017,56(1). |
| APA | Zhu, Meiping.,Xing, Huanbin.,Chai, Yingjie.,Shao, Jianda.,Yi, Kui.,...&Wang, Jianguo.(2017).Improving the laser-induced damage threshold of 532-nm antireflection coating using plasma ion cleaning.Opt. Eng.,56(1). |
| MLA | Zhu, Meiping,et al."Improving the laser-induced damage threshold of 532-nm antireflection coating using plasma ion cleaning".Opt. Eng. 56.1(2017). |
入库方式： OAI收割
来源：上海光学精密机械研究所
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