Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry
文献类型：期刊论文
| 作者 | Shan, Yao; Zeng, Aijun; He, Hongbo; Gu, Liyuan; Hu, Guohang; Sytchkova, Anna; Zhao, Yuanan |
| 刊名 | Appl. Optics
 |
| 出版日期 | 2017 |
| 卷号 | 56期号:28页码:7898 |
| 通讯作者 | huguohang@siom.ac.cn ; anna.sytchkova@enea.it |
| 英文摘要 | A setup for surface-plasmon-resonance-(SPR) based imaging ellipsometry was developed, which gains from the sensitivities of both SPR and ellipsometry to ultrathin film parameters. It is based on Otto's configuration for prism -sample coupling and a wide-beam imaging ellipsometry. A set of ultrathin gold and silver films was measured to determine their optical constants and thicknesses. Coupling the sample using a prism with a convex surface enables us to capture images of generated SPR elliptical fringes, which correspond to different SPR amplitude values at different air gap thicknesses. Analysis of the images acquired at different polarizer and analyzer angles provides the ellipsometric functions. and. versus thickness of air gap and hence the extraction of the optical constants of ultrathin metal films. The measured film thickness is in agreement with the results of x-ray reflectivity measurements. |
| 收录类别 | SCI |
| 资助信息 | National Natural Science Foundation of China (NSFC) [61405219]; National Key Research and Development Project of China [2016YFE0104300]; Italian-Chinese Project of Great Relevance [PGR00799] |
| WOS记录号 | WOS:000412053200017 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/28131]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Shan, Yao,Zeng, Aijun,He, Hongbo,et al. Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry[J]. Appl. Optics,2017,56(28):7898. |
| APA | Shan, Yao.,Zeng, Aijun.,He, Hongbo.,Gu, Liyuan.,Hu, Guohang.,...&Zhao, Yuanan.(2017).Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry.Appl. Optics,56(28),7898. |
| MLA | Shan, Yao,et al."Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry".Appl. Optics 56.28(2017):7898. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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