Optical surfacing via linear ion source
文献类型：期刊论文
| 作者 | Wu, Lixiang; Wei, Chaoyang; Shao, Jianda |
| 刊名 | Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms
 |
| 出版日期 | 2017 |
| 卷号 | 397页码:82 |
| 通讯作者 | wulx@hdu.edu.cn ; siomwei@siom.ac.cn ; jdshao@siom.ac.cn |
| 英文摘要 | We present a concept of surface decomposition extended from double Fourier series to nonnegative sinusoidal wave surfaces, on the basis of which linear ion sources apply to the ultra-precision fabrication of complex surfaces and diffractive optics. The modified Fourier series, or sinusoidal wave surfaces, build a relationship between the fabrication process of optical surfaces and the surface characterization based on power spectral density (PSD) analysis. Also, we demonstrate that the one-dimensional scanning of linear ion source is applicable to the removal of mid-spatial frequency (MSF) errors caused by small-tool polishing in raster scan mode as well as the fabrication of beam sampling grating of high diffractive uniformity without a post-processing procedure. The simulation results show that optical fabrication with linear ion source is feasible and even of higher output efficiency compared with the conventional approach. (C) 2017 Elsevier B.V. All rights reserved. |
| 收录类别 | SCI |
| 资助信息 | Youth Innovation Promotion Association of the Chinese Academy of Sciences |
| WOS记录号 | WOS:000399627100012 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/28143]  |
| 专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Wu, Lixiang,Wei, Chaoyang,Shao, Jianda. Optical surfacing via linear ion source[J]. Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms,2017,397:82. |
| APA | Wu, Lixiang,Wei, Chaoyang,&Shao, Jianda.(2017).Optical surfacing via linear ion source.Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms,397,82. |
| MLA | Wu, Lixiang,et al."Optical surfacing via linear ion source".Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms 397(2017):82. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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