中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Origin of arbitrary patterns by direct laser writing in a telluride thin film

文献类型:期刊论文

作者Wang, Yang; Ding, Chenliang; Li, Qisong; Liang, Xin; Bai, Zhen; Zhou, Qijun; Zhang, Kui; Wei, Jingsong; Wei, Tao; Zhang, Long
刊名RSC Adv.
出版日期2016
卷号6期号:51页码:45748
通讯作者weijingsong@siom.ac.cn ; lzhang@siom.ac.cn
英文摘要A crystalline telluride (Te) thin film was prepared by a radio frequency magnetron controlling sputtering method. The fabrication of arbitrary patterns was achieved successfully by our home-built direct laser writing system in the prepared Te thin film. To elucidate the mechanism of pattern formation, micro Xray diffraction, micro Raman spectra and micro reflective spectra before and after exposure were analyzed in detail. The results reveal that the occurrence of arbitrary patterns may be ascribed to the decreased grain size in the Te thin film, which can further be confirmed by the results of AFM and section images of the Te thin film. It is a simple and cost-effective method for arbitrary pattern fabrication based on the reduction of grain size in the laser writing process.
收录类别SCI
资助信息National Natural Science Foundation of China [51172253, 61137002]
WOS记录号WOS:000376120100094
源URL[http://ir.siom.ac.cn/handle/181231/28146]  
专题上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Wang, Yang,Ding, Chenliang,Li, Qisong,et al. Origin of arbitrary patterns by direct laser writing in a telluride thin film[J]. RSC Adv.,2016,6(51):45748.
APA Wang, Yang.,Ding, Chenliang.,Li, Qisong.,Liang, Xin.,Bai, Zhen.,...&Zhang, Long.(2016).Origin of arbitrary patterns by direct laser writing in a telluride thin film.RSC Adv.,6(51),45748.
MLA Wang, Yang,et al."Origin of arbitrary patterns by direct laser writing in a telluride thin film".RSC Adv. 6.51(2016):45748.

入库方式: OAI收割

来源:上海光学精密机械研究所

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