Origin of arbitrary patterns by direct laser writing in a telluride thin film
文献类型:期刊论文
作者 | Wang, Yang; Ding, Chenliang; Li, Qisong; Liang, Xin; Bai, Zhen; Zhou, Qijun; Zhang, Kui; Wei, Jingsong; Wei, Tao; Zhang, Long |
刊名 | RSC Adv.
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出版日期 | 2016 |
卷号 | 6期号:51页码:45748 |
通讯作者 | weijingsong@siom.ac.cn ; lzhang@siom.ac.cn |
英文摘要 | A crystalline telluride (Te) thin film was prepared by a radio frequency magnetron controlling sputtering method. The fabrication of arbitrary patterns was achieved successfully by our home-built direct laser writing system in the prepared Te thin film. To elucidate the mechanism of pattern formation, micro Xray diffraction, micro Raman spectra and micro reflective spectra before and after exposure were analyzed in detail. The results reveal that the occurrence of arbitrary patterns may be ascribed to the decreased grain size in the Te thin film, which can further be confirmed by the results of AFM and section images of the Te thin film. It is a simple and cost-effective method for arbitrary pattern fabrication based on the reduction of grain size in the laser writing process. |
收录类别 | SCI |
资助信息 | National Natural Science Foundation of China [51172253, 61137002] |
WOS记录号 | WOS:000376120100094 |
源URL | [http://ir.siom.ac.cn/handle/181231/28146] ![]() |
专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
作者单位 | 中国科学院上海光学精密机械研究所 |
推荐引用方式 GB/T 7714 | Wang, Yang,Ding, Chenliang,Li, Qisong,et al. Origin of arbitrary patterns by direct laser writing in a telluride thin film[J]. RSC Adv.,2016,6(51):45748. |
APA | Wang, Yang.,Ding, Chenliang.,Li, Qisong.,Liang, Xin.,Bai, Zhen.,...&Zhang, Long.(2016).Origin of arbitrary patterns by direct laser writing in a telluride thin film.RSC Adv.,6(51),45748. |
MLA | Wang, Yang,et al."Origin of arbitrary patterns by direct laser writing in a telluride thin film".RSC Adv. 6.51(2016):45748. |
入库方式: OAI收割
来源:上海光学精密机械研究所
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