中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials

文献类型:期刊论文

作者Li, Wen J.; Lee, Gwo-Bin; Wang, Yuechao; Wang, Jun; Xie, Shaorong; Yu, Haibo; Liu, Lianqing; Wang, Feifei; Liu, Na
刊名Sci Rep
出版日期2016
卷号6
通讯作者lqliu@sia.cn ; wenjli@cityu.edu.hk
英文摘要The synthesis and assembly of components are key steps in micro/nano device manufacturing. In this article, we report an optically controlled assembly method that can rapidly pattern micro/nano devices by directly assembling ions and nanomaterials without expensive physical masks and complex etching processes. Utilizing this controllable process, different types of device components (e.g., metallic and semiconductor) can be fabricated and assembled in 10-30 seconds, which is far more rapid and cost-effective than any other micro/nano fabrication method.
收录类别SCI
资助信息National Natural Science Foundation of China [61302003, 61522312, 61178007, 61522510]; NSFC/RGC Joint Research Scheme [51461165501, N_CityU132/14]; Hong Kong Research Grants Council [CityU 118513]; CAS-FEA International Partnership Program for Creative Re
WOS记录号WOS:000381978200001
源URL[http://ir.siom.ac.cn/handle/181231/28166]  
专题上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Li, Wen J.,Lee, Gwo-Bin,Wang, Yuechao,et al. Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials[J]. Sci Rep,2016,6.
APA Li, Wen J..,Lee, Gwo-Bin.,Wang, Yuechao.,Wang, Jun.,Xie, Shaorong.,...&Liu, Na.(2016).Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials.Sci Rep,6.
MLA Li, Wen J.,et al."Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials".Sci Rep 6(2016).

入库方式: OAI收割

来源:上海光学精密机械研究所

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