Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials
文献类型:期刊论文
作者 | Li, Wen J.; Lee, Gwo-Bin; Wang, Yuechao; Wang, Jun; Xie, Shaorong; Yu, Haibo; Liu, Lianqing; Wang, Feifei; Liu, Na |
刊名 | Sci Rep
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出版日期 | 2016 |
卷号 | 6 |
通讯作者 | lqliu@sia.cn ; wenjli@cityu.edu.hk |
英文摘要 | The synthesis and assembly of components are key steps in micro/nano device manufacturing. In this article, we report an optically controlled assembly method that can rapidly pattern micro/nano devices by directly assembling ions and nanomaterials without expensive physical masks and complex etching processes. Utilizing this controllable process, different types of device components (e.g., metallic and semiconductor) can be fabricated and assembled in 10-30 seconds, which is far more rapid and cost-effective than any other micro/nano fabrication method. |
收录类别 | SCI |
资助信息 | National Natural Science Foundation of China [61302003, 61522312, 61178007, 61522510]; NSFC/RGC Joint Research Scheme [51461165501, N_CityU132/14]; Hong Kong Research Grants Council [CityU 118513]; CAS-FEA International Partnership Program for Creative Re |
WOS记录号 | WOS:000381978200001 |
源URL | [http://ir.siom.ac.cn/handle/181231/28166] ![]() |
专题 | 上海光学精密机械研究所_中科院强激光材料重点实验室 |
作者单位 | 中国科学院上海光学精密机械研究所 |
推荐引用方式 GB/T 7714 | Li, Wen J.,Lee, Gwo-Bin,Wang, Yuechao,et al. Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials[J]. Sci Rep,2016,6. |
APA | Li, Wen J..,Lee, Gwo-Bin.,Wang, Yuechao.,Wang, Jun.,Xie, Shaorong.,...&Liu, Na.(2016).Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials.Sci Rep,6. |
MLA | Li, Wen J.,et al."Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials".Sci Rep 6(2016). |
入库方式: OAI收割
来源:上海光学精密机械研究所
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