Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp
文献类型：期刊论文
| 作者 | Yuan, Zhijun; Zhang, Haibo; Ye, Ren; Zhou, Jun; Wei, Yunrong; Lou, Qihong |
| 刊名 | Chin. Opt. Lett.
 |
| 出版日期 | 2017 |
| 卷号 | 15期号:7 |
| 通讯作者 | junzhousd@siom.ac.cn |
| 英文摘要 | Accurate and precise wavelength controlling of narrowband excimer lasers is essential for the lithography of an integrated circuit. High-precision wavelength tuning and calibration of a line-narrowed ArF laser are presented in this work. The laser spectrum is narrowed to a sub-picometer with a line narrowing system. Absolute wavelength calibration of the line-narrowed laser is performed based on the optogalvanic (OG) effect using iron hollow cathode discharge (HCD). An sccuracy of better than 0.1 pm for wavelength tuning and calibration is achieved with our homemade wavemeter. |
| 收录类别 | SCI |
| 资助信息 | National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] |
| WOS记录号 | WOS:000405355000012 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/28449]  |
| 专题 | 上海光学精密机械研究所_空间激光信息技术研究中心 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Yuan, Zhijun,Zhang, Haibo,Ye, Ren,et al. Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp[J]. Chin. Opt. Lett.,2017,15(7). |
| APA | Yuan, Zhijun,Zhang, Haibo,Ye, Ren,Zhou, Jun,Wei, Yunrong,&Lou, Qihong.(2017).Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp.Chin. Opt. Lett.,15(7). |
| MLA | Yuan, Zhijun,et al."Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp".Chin. Opt. Lett. 15.7(2017). |
入库方式： OAI收割
来源：上海光学精密机械研究所
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