Method of pupil shaping for off-axis illumination in optical lithography
文献类型：期刊论文
| 作者 | Chen, Ming; Huang, Huijie; Yang, Baoxi; Zhu, Jing; Zeng, Aijun; Zhang, Fang |
| 刊名 | J. Opt. Technol.
 |
| 出版日期 | 2016 |
| 卷号 | 83期号:3页码:154 |
| 通讯作者 | aijunzeng@siom.ac.cn |
| 英文摘要 | Off-axis illumination is one of the key resolution enhancement technologies in projection lithography systems. Phase type diffractive optical elements are adopted by most of the lithography machine manufacturers to realize off-axis illumination. In this paper, a method of pupil shaping for off-axis illumination in optical lithography is introduced which contains a zoom beam expander, circularly symmetric diffractive optical elements, and a Fourier lens. The method could produce the required illumination pattern for off-axis illumination at the pupil plane. Compared with the conventional method of off-axis illumination, the method in this paper could eliminate deterioration of the pupil thoroughly and reduces the difficulty of the optical design of the zoom lens. Based on this method, several circularly symmetric diffractive optical elements are designed for experiments, and a remarkable improvement in eliminating deterioration of the pupil is observed compared with the conventional method. (C) 2016 Optical Society of America. |
| 收录类别 | SCI |
| WOS记录号 | WOS:000381743600004 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/28505]  |
| 专题 | 上海光学精密机械研究所_信息光学与光电技术实验室 |
| 作者单位 | 中国科学院上海光学精密机械研究所 |
| 推荐引用方式 GB/T 7714 | Chen, Ming,Huang, Huijie,Yang, Baoxi,et al. Method of pupil shaping for off-axis illumination in optical lithography[J]. J. Opt. Technol.,2016,83(3):154. |
| APA | Chen, Ming,Huang, Huijie,Yang, Baoxi,Zhu, Jing,Zeng, Aijun,&Zhang, Fang.(2016).Method of pupil shaping for off-axis illumination in optical lithography.J. Opt. Technol.,83(3),154. |
| MLA | Chen, Ming,et al."Method of pupil shaping for off-axis illumination in optical lithography".J. Opt. Technol. 83.3(2016):154. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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