Enhanced performance of 17.7 GHz SAW devices based on AlN/diamond/Si layered structure with embedded nanotransducer
文献类型：期刊论文
| 作者 | Enhanced performance of 17.7 GHz SAW devices based on AlN/diamond/Si layered structure with embedded nanotransducer |
| 刊名 | Appl. Phys. Lett.
 |
| 出版日期 | 2017 |
| 卷号 | 111页码:253502 |
| 学科主题 | 微电子学 |
| 公开日期 | 2018-07-02 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/28658]  |
| 专题 | 半导体研究所_集成光电子学国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Enhanced performance of 17.7 GHz SAW devices based on AlN/diamond/Si layered structure with embedded nanotransducer. Enhanced performance of 17.7 GHz SAW devices based on AlN/diamond/Si layered structure with embedded nanotransducer[J]. Appl. Phys. Lett.,2017,111:253502. |
| APA | Enhanced performance of 17.7 GHz SAW devices based on AlN/diamond/Si layered structure with embedded nanotransducer.(2017).Enhanced performance of 17.7 GHz SAW devices based on AlN/diamond/Si layered structure with embedded nanotransducer.Appl. Phys. Lett.,111,253502. |
| MLA | Enhanced performance of 17.7 GHz SAW devices based on AlN/diamond/Si layered structure with embedded nanotransducer."Enhanced performance of 17.7 GHz SAW devices based on AlN/diamond/Si layered structure with embedded nanotransducer".Appl. Phys. Lett. 111(2017):253502. |
入库方式： OAI收割
来源：半导体研究所
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