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On the generation of magnetic field enhanced microwave plasma line

文献类型：期刊论文

作者Chen, Longwei1; Zhao, Ying1; Wu, Kenan2; Wang, Qi1; Meng, Yuedong1; Ren, Zhaoxing1
刊名PHYSICS OF PLASMAS
出版日期2016-12-01
卷号23期号:12页码:123509
DOI10.1063/1.4971446
文献子类Article
英文摘要Microwave linear plasmas sustained by surface waves have attracted much attention due to the potential abilities to generate large-scale and uniform non-equilibrium plasmas. An external magnetic field was generally applied to enhance and stabilize plasma sources because the magnetic field decreased the electron losses on the wall. The effects of magnetic field on the generation and propagation mechanisms of the microwave plasma were tentatively investigated based on a 2-D numerical model combining a coupled system of Maxwell's equations and continuity equations. The mobility of electrons and effective electric conductivity of the plasma were considered as a full tensor in the presence of magnetic field. Numerical results indicate that both cases of magnetic field in the axial-direction and radial-direction benefit the generation of a high-density plasma; the former one allows the microwave to propagate longer in the axis direction compared to the latter one. The time-averaged power flow density and the amplitude of the electric field on the inner rod of coaxial waveguide attenuate with the propagation of the microwave for both cases of with and without external magnetic field. The attenuation becomes smaller in the presence of appropriately higher axial-direction magnetic field, which allows more microwave energies to transmit along the axial direction. Meanwhile, the anisotropic properties of the plasma, like electron mobility, in the presence of the magnetic field confine more charged particles in the direction of the magnetic field line. Published by AIP Publishing.
WOS关键词SPACE-CHARGE WAVES ; NUMERICAL-SIMULATION ; DEPOSITION ; COLUMNS ; DENSITY ; FREQUENCY ; HELICONS ; SILICON ; PECVD
WOS研究方向Physics
语种英语
WOS记录号WOS:000392013000103
资助机构National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Natural Science Foundation of China(11205201 ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; National Nature Science Foundation of Anhui Province(1508085QA10) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252) ; 11575252)
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/21860]  
专题合肥物质科学研究院_中科院等离子体物理研究所
作者单位1.Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Peoples R China
2.Chinese Acad Sci, Dalian Inst Chem Phys, Dalian 116023, Peoples R China
推荐引用方式
GB/T 7714		 Chen, Longwei,Zhao, Ying,Wu, Kenan,et al. On the generation of magnetic field enhanced microwave plasma line[J]. PHYSICS OF PLASMAS,2016,23(12):123509.
APA Chen, Longwei,Zhao, Ying,Wu, Kenan,Wang, Qi,Meng, Yuedong,&Ren, Zhaoxing.(2016).On the generation of magnetic field enhanced microwave plasma line.PHYSICS OF PLASMAS,23(12),123509.
MLA Chen, Longwei,et al."On the generation of magnetic field enhanced microwave plasma line".PHYSICS OF PLASMAS 23.12(2016):123509.

入库方式： OAI收割

来源：合肥物质科学研究院

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