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Surface structure and electric properties of nitrogen incorporated NCD films

文献类型：期刊论文

作者Sun, Qi1; Wang, Jianhua1,2; Weng, Jun1; Liu, Fan1
刊名VACUUM
出版日期2017-03-01
卷号137期号:无页码:155-162
关键词Nitrogen Rich Plasma n Incorporated Electric Performance Ncd
DOI10.1016/j.vacuum.2016.12.040
文献子类Article
英文摘要Linear characteristics were shown in I-V curves for nanocrytalline diamond (NCD) films deposited in a nitrogen rich atmosphere by microwave plasma chemical vapor deposition (MPCVD). In order to figure out how grain size, fraction and structure of N incorporated NCD films influence the electric performances of NCD films, the scanning electron microscopy (SEM), X-ray diffractometer (XRD), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy were applied. Different surface morphologies are shown while the nitrogen concentration was varied. A similar tendency of electrical conductivity change versus grain size decrease and grain boundary network increase in NCD films has been observed. C1s core-energy, N1s core-energy and Raman spectra showed that the fraction and the chemical bonds of carbon atoms varied when the N-2 concentration in plasma was different. All these measurements indicate that N-2 concentration in plasma is a critical parameter for the growth, grain size, chemical bond and the electrical performance of deposited NCD films. (C) 2016 Elsevier Ltd. All rights reserved.
WOS关键词NANOCRYSTALLINE DIAMOND FILMS ; DOPED ULTRANANOCRYSTALLINE DIAMOND ; GROWTH ; SPECTROSCOPY ; DEPOSITION ; MORPHOLOGY ; GRAPHENE ; PLASMAS ; CVD
WOS研究方向Materials Science ; Physics
语种英语
WOS记录号WOS:000394070200023
资助机构Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Natural Science Foundation of China(11175137) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517) ; Project of Hubei Provincial Department of Education(Q20151517)
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/31694]  
专题合肥物质科学研究院_中科院等离子体物理研究所
作者单位1.Wuhan Inst Technol, Key Lab Plasma Chem & Adv Mat Hubei Prov, Wuhan 430070, Peoples R China
2.Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Peoples R China
推荐引用方式
GB/T 7714		 Sun, Qi,Wang, Jianhua,Weng, Jun,et al. Surface structure and electric properties of nitrogen incorporated NCD films[J]. VACUUM,2017,137(无):155-162.
APA Sun, Qi,Wang, Jianhua,Weng, Jun,&Liu, Fan.(2017).Surface structure and electric properties of nitrogen incorporated NCD films.VACUUM,137(无),155-162.
MLA Sun, Qi,et al."Surface structure and electric properties of nitrogen incorporated NCD films".VACUUM 137.无(2017):155-162.

入库方式： OAI收割

来源：合肥物质科学研究院

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