中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Interface optimization and modification of band offsets of ALD-derived Al2O3/HfO2/Al2O3/Ge gate stacks by annealing temperature

文献类型:期刊论文

作者H.H. Wei1; G. He1,2; J. Gao3; M. Liu4; X.S. Chen2; Z.Q. Sun1
刊名Journal of Alloys and Compounds
出版日期2014
卷号615期号:页码:672-675
源URL[http://ir.hfcas.ac.cn/handle/334002/20764]  
专题合肥物质科学研究院_中科院固体物理研究所
作者单位1.School of Physics and Materials Science, Radiation Detection Materials & Devices Lab, Anhui University, Hefei 230601, China
2.National Laboratory for Infrared Physics, Chinese Academy of Sciences, Shanghai Institute of Technical Physics, 500 Yutian Road, Shanghai 200083, China
3.School of Sciences, Anhui University of Science and Technology, Huainan 232001, China
4.Key Laboratory of Materials Physics, Anhui Key Laboratory of Nanomaterials and Nanostructure, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031, China
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GB/T 7714
H.H. Wei,G. He,J. Gao,et al. Interface optimization and modification of band offsets of ALD-derived Al2O3/HfO2/Al2O3/Ge gate stacks by annealing temperature[J]. Journal of Alloys and Compounds,2014,615(无):672-675.
APA H.H. Wei,G. He,J. Gao,M. Liu,X.S. Chen,&Z.Q. Sun.(2014).Interface optimization and modification of band offsets of ALD-derived Al2O3/HfO2/Al2O3/Ge gate stacks by annealing temperature.Journal of Alloys and Compounds,615(无),672-675.
MLA H.H. Wei,et al."Interface optimization and modification of band offsets of ALD-derived Al2O3/HfO2/Al2O3/Ge gate stacks by annealing temperature".Journal of Alloys and Compounds 615.无(2014):672-675.

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来源:合肥物质科学研究院

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