Influence of sputtering power on the phase transition performance of VO2 thin films grown by magnetron sputtering
文献类型:期刊论文
作者 | Luo, Y. Y.![]() ![]() ![]() |
刊名 | JOURNAL OF ALLOYS AND COMPOUNDS
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出版日期 | 2016-04-15 |
卷号 | 664期号:无页码:626-631 |
关键词 | Vo2 Thin Film Sputtering Power Phase Transition Electrical Resistance Infrared Transmittance Switching Performance |
DOI | 10.1016/j.jallcom.2015.12.222 |
文献子类 | Article |
英文摘要 | The influence of sputtering power on the electrical and infrared properties of VO2 thin films was investigated. It was found that the controlling of sputtering power is very important in realizing the pure VO2 (M) thin film. The thin films grown at the sputtering powers of 350 W and above have a similar phase transition behavior to bulk VO2. The infrared transmittance and electrical resistance of the VO2 thin film also depend on the sputtering power, and the hysteresis width is controlled by the size effect. The film thickness and defect density affect the amplitudes of the phase transition and phase transition temperature. (C) 2015 Elsevier B.V. All rights reserved. |
WOS关键词 | VANADIUM DIOXIDE ; ELECTRICAL-PROPERTIES ; PRESSURE ; COATINGS ; DESIGN ; WINDOW |
WOS研究方向 | Chemistry ; Materials Science ; Metallurgy & Metallurgical Engineering |
语种 | 英语 |
WOS记录号 | WOS:000369061700081 |
资助机构 | National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) |
源URL | [http://ir.hfcas.ac.cn:8080/handle/334002/22109] ![]() |
专题 | 合肥物质科学研究院_中科院固体物理研究所 |
作者单位 | Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Anhui Key Lab Nanomat & Nanostruct, Hefei 230031, Peoples R China |
推荐引用方式 GB/T 7714 | Luo, Y. Y.,Pan, S. S.,Xu, S. C.,et al. Influence of sputtering power on the phase transition performance of VO2 thin films grown by magnetron sputtering[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2016,664(无):626-631. |
APA | Luo, Y. Y.,Pan, S. S.,Xu, S. C.,Zhong, L.,Wang, H.,&Li, G. H..(2016).Influence of sputtering power on the phase transition performance of VO2 thin films grown by magnetron sputtering.JOURNAL OF ALLOYS AND COMPOUNDS,664(无),626-631. |
MLA | Luo, Y. Y.,et al."Influence of sputtering power on the phase transition performance of VO2 thin films grown by magnetron sputtering".JOURNAL OF ALLOYS AND COMPOUNDS 664.无(2016):626-631. |
入库方式: OAI收割
来源:合肥物质科学研究院
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