中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Influence of sputtering power on the phase transition performance of VO2 thin films grown by magnetron sputtering

文献类型:期刊论文

作者Luo, Y. Y.; Pan, S. S.; Xu, S. C.; Zhong, L.; Wang, H.; Li, G. H.
刊名JOURNAL OF ALLOYS AND COMPOUNDS
出版日期2016-04-15
卷号664期号:页码:626-631
关键词Vo2 Thin Film Sputtering Power Phase Transition Electrical Resistance Infrared Transmittance Switching Performance
DOI10.1016/j.jallcom.2015.12.222
文献子类Article
英文摘要The influence of sputtering power on the electrical and infrared properties of VO2 thin films was investigated. It was found that the controlling of sputtering power is very important in realizing the pure VO2 (M) thin film. The thin films grown at the sputtering powers of 350 W and above have a similar phase transition behavior to bulk VO2. The infrared transmittance and electrical resistance of the VO2 thin film also depend on the sputtering power, and the hysteresis width is controlled by the size effect. The film thickness and defect density affect the amplitudes of the phase transition and phase transition temperature. (C) 2015 Elsevier B.V. All rights reserved.
WOS关键词VANADIUM DIOXIDE ; ELECTRICAL-PROPERTIES ; PRESSURE ; COATINGS ; DESIGN ; WINDOW
WOS研究方向Chemistry ; Materials Science ; Metallurgy & Metallurgical Engineering
语种英语
WOS记录号WOS:000369061700081
资助机构National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; National Natural Science Foundation of China(51471163 ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270) ; 11104270)
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/22109]  
专题合肥物质科学研究院_中科院固体物理研究所
作者单位Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Anhui Key Lab Nanomat & Nanostruct, Hefei 230031, Peoples R China
推荐引用方式
GB/T 7714
Luo, Y. Y.,Pan, S. S.,Xu, S. C.,et al. Influence of sputtering power on the phase transition performance of VO2 thin films grown by magnetron sputtering[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2016,664(无):626-631.
APA Luo, Y. Y.,Pan, S. S.,Xu, S. C.,Zhong, L.,Wang, H.,&Li, G. H..(2016).Influence of sputtering power on the phase transition performance of VO2 thin films grown by magnetron sputtering.JOURNAL OF ALLOYS AND COMPOUNDS,664(无),626-631.
MLA Luo, Y. Y.,et al."Influence of sputtering power on the phase transition performance of VO2 thin films grown by magnetron sputtering".JOURNAL OF ALLOYS AND COMPOUNDS 664.无(2016):626-631.

入库方式: OAI收割

来源:合肥物质科学研究院

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