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Design and fabrication of micro-nano fusion gas sensor based on two-beam micro-hotplatform

文献类型：期刊论文

作者Guo, Lianfeng1,2; Xu, Lei4; Xu, Zongke3; Duan, Guotao3; Wang, Yi1; Zhou, Hong1; Liu, Yanxiang1; Cai, Weiping3; Wang, Yuelin1; Li, Tie1
刊名MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
出版日期2017-07-01
卷号23期号:7页码:2699-2705
DOI10.1007/s00542-016-3091-0
文献子类Article
英文摘要Micro-nano fusion gas sensors integrating two-beam micro-hotplatform with nanostructured porous film were fabricated in this study. The micro-hotplatform (MHP) was manufactured using standard micro-electro-mechanical systems technology in wafer runs. Based on a colloidal crystal template method, highly ordered porous tin dioxide films were in situ grown on the MHP. The as-fabricated sensors achieved the highest response at 250 A degrees C with power consumption only 24 mW. Due to the low thermal capacity and ordered porous thin films of the sensor, the response time was about 2 s. The sensors are sensitive to ethanol in a large range from 0.1 to 250 ppm. The developed sensor here with high performance is an excellent candidate which can be incorporated into portable devices for alcohol detection such as breath analyzers.
WOS关键词TIN OXIDE ; PERFORMANCE ; ETHANOL ; CO
WOS研究方向Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
语种英语
WOS记录号WOS:000404149800037
资助机构National Basic Research Program of China(2012CB934102) ; National Basic Research Program of China(2012CB934102) ; National Basic Research Program of China(2012CB934102) ; National Basic Research Program of China(2012CB934102) ; National Science and Technology Supporting Program(2012BAJ11B01) ; National Science and Technology Supporting Program(2012BAJ11B01) ; National Science and Technology Supporting Program(2012BAJ11B01) ; National Science and Technology Supporting Program(2012BAJ11B01) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Key Project of National Natural Science Foundation of China(91323304) ; Key Project of National Natural Science Foundation of China(91323304) ; Key Project of National Natural Science Foundation of China(91323304) ; Key Project of National Natural Science Foundation of China(91323304) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; National Basic Research Program of China(2012CB934102) ; National Basic Research Program of China(2012CB934102) ; National Basic Research Program of China(2012CB934102) ; National Basic Research Program of China(2012CB934102) ; National Science and Technology Supporting Program(2012BAJ11B01) ; National Science and Technology Supporting Program(2012BAJ11B01) ; National Science and Technology Supporting Program(2012BAJ11B01) ; National Science and Technology Supporting Program(2012BAJ11B01) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Fund for Creative Research of National Natural Science Foundation of China(61321492) ; Key Project of National Natural Science Foundation of China(91323304) ; Key Project of National Natural Science Foundation of China(91323304) ; Key Project of National Natural Science Foundation of China(91323304) ; Key Project of National Natural Science Foundation of China(91323304) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; Project for Shanghai Outstanding Academic leaders(15XD1504300) ; Project for Shanghai Outstanding Academic leaders(15XD1504300)
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/31974]  
专题合肥物质科学研究院_中科院固体物理研究所
作者单位1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, Shanghai 200050, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
3.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Anhui Key Lab Nanomat & Nanotechnol, Hefei 230031, Anhui, Peoples R China
4.East China Res Inst Elect Engn, Hefei 230088, Anhui, Peoples R China
推荐引用方式
GB/T 7714		 Guo, Lianfeng,Xu, Lei,Xu, Zongke,et al. Design and fabrication of micro-nano fusion gas sensor based on two-beam micro-hotplatform[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2017,23(7):2699-2705.
APA Guo, Lianfeng.,Xu, Lei.,Xu, Zongke.,Duan, Guotao.,Wang, Yi.,...&Li, Tie.(2017).Design and fabrication of micro-nano fusion gas sensor based on two-beam micro-hotplatform.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,23(7),2699-2705.
MLA Guo, Lianfeng,et al."Design and fabrication of micro-nano fusion gas sensor based on two-beam micro-hotplatform".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 23.7(2017):2699-2705.

入库方式： OAI收割

来源：合肥物质科学研究院

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