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On-Demand Fabrication of Si/SiO2 Nanowire Arrays by Nanosphere Lithography and Subsequent Thermal Oxidation

文献类型：期刊论文

作者Cao, Huaxiang1,2; Li, Xinhua1; Zhou, Bukang1,2; Chen, Tao1,2; Shi, Tongfei1; Zheng, Jianqiang1,2; Liu, Guangqiang1; Wang, Yuqi1
刊名NANOSCALE RESEARCH LETTERS
出版日期2017-02-09
卷号12期号:无页码:1-8
关键词Nanospherelithography Metal-assisted Chemical Etching (Mace) Nanowire Arrays Thermal Oxidation
DOI10.1186/s11671-017-1883-5
文献子类Article
英文摘要We demonstrate the fabrication of the large-area arrays of vertically aligned Si/SiO2 nanowires with full tunability of the geometry of the single nanowires by the metal-assisted chemical etching technique and the following thermal oxidation process. To fabricate the geometry controllable Si/SiO2 nanowire (NW) arrays, two critical issues relating with the size control of polystyrene reduction and oxide thickness evolution are investigated. Through analyzing the morphology evolutions of polystyrene particles, we give a quantitative description on the diameter variations of polystyrene particles with the etching time of plasma etching. Based on this, pure Si NW arrays with controllable geometry are generated. Then the oxide dynamic of Si NW is analyzed by the extended Deal-Grove model. By control, the initial Si NWs and the thermal oxidation time, the well-aligned Si/SiO2 composite NW arrays with controllable geometry are obtained.
WOS关键词CORE-SHELL NANOWIRES ; SILICON-OXIDE FILMS ; SOLAR-CELLS ; ION BATTERY ; NANOSTRUCTURES ; DIAMETER ; DENSITY ; LAYER ; ANODE
WOS研究方向Science & Technology - Other Topics ; Materials Science ; Physics
语种英语
WOS记录号WOS:000394276600003
资助机构National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; 51671182) ; 51671182) ; 51671182) ; 51671182) ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; National Natural Science Foundation of China(51472247 ; 51671182) ; 51671182) ; 51671182) ; 51671182)
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/32836]  
专题合肥物质科学研究院_中科院固体物理研究所
作者单位1.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei 230031, Peoples R China
2.Univ Sci & Technol China, Hefei 230026, Peoples R China
推荐引用方式
GB/T 7714		 Cao, Huaxiang,Li, Xinhua,Zhou, Bukang,et al. On-Demand Fabrication of Si/SiO2 Nanowire Arrays by Nanosphere Lithography and Subsequent Thermal Oxidation[J]. NANOSCALE RESEARCH LETTERS,2017,12(无):1-8.
APA Cao, Huaxiang.,Li, Xinhua.,Zhou, Bukang.,Chen, Tao.,Shi, Tongfei.,...&Wang, Yuqi.(2017).On-Demand Fabrication of Si/SiO2 Nanowire Arrays by Nanosphere Lithography and Subsequent Thermal Oxidation.NANOSCALE RESEARCH LETTERS,12(无),1-8.
MLA Cao, Huaxiang,et al."On-Demand Fabrication of Si/SiO2 Nanowire Arrays by Nanosphere Lithography and Subsequent Thermal Oxidation".NANOSCALE RESEARCH LETTERS 12.无(2017):1-8.

入库方式： OAI收割

来源：合肥物质科学研究院

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