Microstructure and NO2 sensing properties of Fe2O3 thin films
文献类型：期刊论文
| 作者 | Matsushima S. ; Kunitsugu S. ; Kobayashi K. ; Okada G. |
| 刊名 | Journal of the Ceremic Society of Japan
 |
| 出版日期 | 1994 |
| 卷号 | 102期号:2页码:185-188 |
| 关键词 | Fe2o3 Thin Film No2 Gas Sensor Annealing Temperature Microstructure |
| ISSN号 | 0914-5400 |
| 英文摘要 | W-doped Fe2O3 films have been fabricated on polycrystalline alumina substrates by the RF magnetron sputtering method, and effects of annealing temperature on the NO2 sensing properties have been examined. The crystal structure of the obtained film changed from Fe3O4 to α-Fe2O3 after annealing at temperatures of 500 to 500°C in air. An increase in the annealing temperature increased the particle size, resulting in a decrease in the NO2-gas sensitivity. These results suggest that the NO2 sensitivity of W-doped Fe2O3 film depends on the particle size. |
| 公开日期 | 2011-01-07 |
| 源URL | [http://ir.yic.ac.cn/handle/133337/3158]  |
| 专题 | 烟台海岸带研究所_科研共享资源 |
| 推荐引用方式 GB/T 7714 | Matsushima S.,Kunitsugu S.,Kobayashi K.,et al. Microstructure and NO2 sensing properties of Fe2O3 thin films[J]. Journal of the Ceremic Society of Japan,1994,102(2):185-188. |
| APA | Matsushima S.,Kunitsugu S.,Kobayashi K.,&Okada G..(1994).Microstructure and NO2 sensing properties of Fe2O3 thin films.Journal of the Ceremic Society of Japan,102(2),185-188. |
| MLA | Matsushima S.,et al."Microstructure and NO2 sensing properties of Fe2O3 thin films".Journal of the Ceremic Society of Japan 102.2(1994):185-188. |
入库方式： OAI收割
来源：烟台海岸带研究所
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