中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Towards high-performance transistors and photodetectors with monolayer graphene through modified transfer and lithography process

文献类型:期刊论文

作者Ge, Bangtong1,2; Zhou, Dahua2; Zhang, Weiguo2; Feng, Shuanglong2; Sun, Lidong1; Shen, Jun2
刊名MATERIALS EXPRESS
出版日期2017-06-01
卷号7期号:3页码:230-236
关键词Graphene Photodetector Polymer Residue Photoresponsivity Mobility
ISSN号2158-5849
DOI10.1166/mex.2017.1361
英文摘要

Although there have been plenty of reports about graphene transistors and photodetectors, due to the carbonization of photoresists during Reactive Ion Etching (RIE) process, polymer residue is widely found in graphene devices, which leads to a weak photoresponse and low carrier mobility. On the other hand, doping in ambient conditions also result in mobility deterioration and Dirac point shift in graphene devices. In this paper, a novel lithography process is found to be efficient in alleviating the polymer residue problem. By inserting a diluted Polymethyl methacrylate (PMMA) interlayer between graphene and photoresists, and using sodium hydroxide (NaOH) solution for strapping, the photoresponse of pure monolayer graphene can be as large as 220 mA/W at 1 V bias, which is much larger than previous reports. Furthermore, by introducing an ammonia solution process during the graphene transfer process, the maximum hole mobility of the back-gated graphene transistor can be larger than 8500 cm(2)V(-1)s(-1), with the Dirac point changed to be near zero. More practically, the mobility exhibits a good stability, which remains high after 20 days in ambient condition. This work provides a feasible route for improving the photoresponsivity and carrier mobility of graphene-based photodetectors.

资助项目Fundamental and Advanced Research Project (Key Program) of ChongQing Municipality[cstc2015jcyjBX0046]
WOS研究方向Science & Technology - Other Topics ; Materials Science
语种英语
WOS记录号WOS:000407015500009
出版者AMER SCIENTIFIC PUBLISHERS
源URL[http://172.16.51.4:88/handle/2HOD01W0/212]  
专题微纳制造与系统集成研究中心
作者单位1.Chongqing Univ, Coll Mat Sci & Engn, Chongqing 400044, Peoples R China
2.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China
推荐引用方式
GB/T 7714
Ge, Bangtong,Zhou, Dahua,Zhang, Weiguo,et al. Towards high-performance transistors and photodetectors with monolayer graphene through modified transfer and lithography process[J]. MATERIALS EXPRESS,2017,7(3):230-236.
APA Ge, Bangtong,Zhou, Dahua,Zhang, Weiguo,Feng, Shuanglong,Sun, Lidong,&Shen, Jun.(2017).Towards high-performance transistors and photodetectors with monolayer graphene through modified transfer and lithography process.MATERIALS EXPRESS,7(3),230-236.
MLA Ge, Bangtong,et al."Towards high-performance transistors and photodetectors with monolayer graphene through modified transfer and lithography process".MATERIALS EXPRESS 7.3(2017):230-236.

入库方式: OAI收割

来源:重庆绿色智能技术研究院

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