Nanochannel fabrication by imprinting-induced cracks
文献类型：期刊论文
| 作者 | Xia, Liangping1,2; Zhang, Man2; Yang, Zheng1 ; Cui, Hongliang1; Yin, Shaoyun1; Hu, Song2; Du, Chunlei1
|
| 刊名 | APPLIED PHYSICS LETTERS
 |
| 出版日期 | 2014-02-17 |
| 卷号 | 104期号:7页码:4 |
| ISSN号 | 0003-6951 |
| DOI | 10.1063/1.4866155 |
| 通讯作者 | Du, CL (reprint author), Chinese Acad Sci, Key Lab Multiscale Mfg Technol, Chongqing Inst Green & Intelligent Technol, Chongqing 400714, Peoples R China. |
| 英文摘要 | A simple and low-cost process of imprinting-induced cracks is proposed to fabricate controllable nanochannel structures with high depth-to-width ratio, in ultraviolet (UV) curable photoresist. The nanochannels are formed by the cracks of UV-curable photoresist due to its volume reduction as a result of solidification, with imprinting induced predesigned crack patterns. The proposed process is demonstrated with a nanochannel structure consisting of a periodically distributed hexagonal 30 nm-width and 100 nm-depth channels, which is fabricated by anodic aluminum oxide template imprinting induced cracks on a thiolene UV-curable photoresist. A finite element analysis provided theoretical foundation for the process, shedding lights on the parameters influencing the process. (C) 2014 AIP Publishing LLC. |
| 资助项目 | National Natural Science Foundation of China[11174281] ; National Natural Science Foundation of China[61275061] ; Graduate Student Innovation Foundation of Institute of Optics and Electronics, Chinese Academy of Sciences ; West Light Foundation of Chinese Academy of Sciences ; Application development project of Chongqing[cstc2013yykfC00007] ; Fundamental and advanced research projects of Chongqing[cstc2013jcyjC00001] |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000332038500056 |
| 出版者 | AMER INST PHYSICS |
| 源URL | [http://119.78.100.138/handle/2HOD01W0/1262]  |
| 专题 | 集成光电技术研究中心 微纳制造与系统集成研究中心 太赫兹技术研究中心 |
| 通讯作者 | Du, Chunlei |
| 作者单位 | 1.Chinese Acad Sci, Key Lab Multiscale Mfg Technol, Chongqing Inst Green & Intelligent Technol, Chongqing 400714, Peoples R China 2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Xia, Liangping,Zhang, Man,Yang, Zheng,et al. Nanochannel fabrication by imprinting-induced cracks[J]. APPLIED PHYSICS LETTERS,2014,104(7):4. |
| APA | Xia, Liangping.,Zhang, Man.,Yang, Zheng.,Cui, Hongliang.,Yin, Shaoyun.,...&Du, Chunlei.(2014).Nanochannel fabrication by imprinting-induced cracks.APPLIED PHYSICS LETTERS,104(7),4. |
| MLA | Xia, Liangping,et al."Nanochannel fabrication by imprinting-induced cracks".APPLIED PHYSICS LETTERS 104.7(2014):4. |
入库方式： OAI收割
来源：重庆绿色智能技术研究院
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