Fabrication of controllable mesh layers above SiNx micro pores with ZnO nanostructures
文献类型:期刊论文
作者 | Zhao, Yue1,2; Ying, Cuifeng2,3; Huang, Qimeng2; Deng, Yunsheng2; Zhou, Daming2![]() ![]() ![]() ![]() |
刊名 | MICROELECTRONIC ENGINEERING
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出版日期 | 2017-02-05 |
卷号 | 169页码:43-48 |
关键词 | Zno Nanorod Arrays Without Catalysts Sealing Sinx Micropores Dna Sequencing |
ISSN号 | 0167-9317 |
DOI | 10.1016/j.mee.2016.12.007 |
英文摘要 | Ultra-long and laterally aligned Zinc Oxide (ZnO) nanorod arrays were directly synthesized around the edges of SiNx micro pores by using a facile and effective chemical vapour deposition process without any catalysts or additives. ZnO nanorods can grow controllably with a preferential orientation as a bridge beyond the edges and gradually seal into a planar free-standing mesh layer. The optimized growth parameters have been thoroughly investigated and identified. A vapour solid synthesis mechanism with source vapour flow rate control has been tentatively proposed on the basis of the experimental data to explain the synthesis: ZnO nanodots first form around the edges of pores due to the local large binding energy and high Zinc (Zn) vapour concentration, and subsequently nanorods grow epitaxially from the nanodots. This precisely-controlled micro pore sealing approach is an important step toward a coherent mechanism for applications in DNA extraction, separation and the next generation DNA sequencing. (C) 2016 Elsevier B.V. All rights reserved. |
资助项目 | National Natural Science Foundation of China[61471336] ; National Natural Science Foundation of China[51503207] ; National Natural Science Foundation of China[61504146] ; National Natural Science Foundation of China[31501084] ; West Light Foundation of the Chinese Academy of Sciences ; Chongqing Funds for Distinguished Young Scientists[Cstc2013jcyjjq 50001] ; Major Program for Application & Development of Chongqing[Cstc2013yykfC 50008] ; instrument development program of CAS[YZ201568] |
WOS研究方向 | Engineering ; Science & Technology - Other Topics ; Optics ; Physics |
语种 | 英语 |
WOS记录号 | WOS:000392901500008 |
出版者 | ELSEVIER SCIENCE BV |
源URL | [http://119.78.100.138/handle/2HOD01W0/3291] ![]() |
专题 | 精准医疗单分子诊断技术研究中心 微纳制造与系统集成研究中心 太赫兹技术研究中心 |
作者单位 | 1.Jilin Univ, Coll Instrumentat & Elect Engn, Changchun 130021, Jilin, Peoples R China 2.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China 3.Nankai Univ, Sch Phys, MOE Key Lab Weak Light Nonlinear Photon, Tianjin 300071, Peoples R China |
推荐引用方式 GB/T 7714 | Zhao, Yue,Ying, Cuifeng,Huang, Qimeng,et al. Fabrication of controllable mesh layers above SiNx micro pores with ZnO nanostructures[J]. MICROELECTRONIC ENGINEERING,2017,169:43-48. |
APA | Zhao, Yue.,Ying, Cuifeng.,Huang, Qimeng.,Deng, Yunsheng.,Zhou, Daming.,...&Cui, Hong-Liang.(2017).Fabrication of controllable mesh layers above SiNx micro pores with ZnO nanostructures.MICROELECTRONIC ENGINEERING,169,43-48. |
MLA | Zhao, Yue,et al."Fabrication of controllable mesh layers above SiNx micro pores with ZnO nanostructures".MICROELECTRONIC ENGINEERING 169(2017):43-48. |
入库方式: OAI收割
来源:重庆绿色智能技术研究院
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