中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Analysis of Ag nanoparticle resist in fabrication of transmission-enhanced subwavelength structures

文献类型:期刊论文

作者Kong, Xiangdong; Fu, Yuegang; Xia, Liangping; Zhang, Weiguo; Zhang, Ziyin; Dong, Lianhe; Wang, Deqiang; Du, Chunlei
刊名JOURNAL OF NANOPHOTONICS
出版日期2016
卷号10期号:4
ISSN号1934-2608
DOI10.1117/1.JNP.10.046017
通讯作者Fu, YG (reprint author), Changchun Univ Sci & Technol, Opt & Elect Engn, 7186 Weixing Rd, Changchun 130022, Jilin, Peoples R China. ; Xia, LP ; Zhang, WG (reprint author), Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Key Lab Multiscale Mfg Technol, 266 Fangzheng Rd, Chongqing 400714, Peoples R China.
英文摘要A theoretical model is proposed to analyze the fabrication of metal nanopartical resist by metal nanofilm annealing, which is used in the manufacture of the transmission-enhanced subwavelength structures at the interface of the optical glass. Based on the conservation of volume of the metal before annealing and after heat treatment, the theoretical relationships of the structure parameters between the metal nanofilm and the metal nanoparticles are obtained. The experimental results coincide well with the theory model, which offers a theoretical guidance to fabricate subwavelength antireflected structures with the advantage of low cost achieved through metal nanofilm annealing. By this means, the average transmission of the quartz device intensifies to 97.9% for the structures fabricated on the both sides compared with the 93% for the unstructured one. (C) 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
语种英语
WOS记录号WOS:000398606100017
源URL[http://119.78.100.138/handle/2HOD01W0/4381]  
专题微纳制造与系统集成研究中心
精准医疗单分子诊断技术研究中心
作者单位(1) Changchun Univ Sci & Technol, Opt & Elect Engn, 7186 Weixing Rd, Changchun 130022, Jilin, Peoples R China; (2) Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Key Lab Multiscale Mfg Technol, 266 Fangzheng Rd, Chongqing 400714, Peoples R China; (3) Jilin Univ, Coll Instrumentat & Elect Engn, 938 Ximinzhu St, Changchun 130061, Jilin, Peoples R China
推荐引用方式
GB/T 7714
Kong, Xiangdong,Fu, Yuegang,Xia, Liangping,et al. Analysis of Ag nanoparticle resist in fabrication of transmission-enhanced subwavelength structures[J]. JOURNAL OF NANOPHOTONICS,2016,10(4).
APA Kong, Xiangdong.,Fu, Yuegang.,Xia, Liangping.,Zhang, Weiguo.,Zhang, Ziyin.,...&Du, Chunlei.(2016).Analysis of Ag nanoparticle resist in fabrication of transmission-enhanced subwavelength structures.JOURNAL OF NANOPHOTONICS,10(4).
MLA Kong, Xiangdong,et al."Analysis of Ag nanoparticle resist in fabrication of transmission-enhanced subwavelength structures".JOURNAL OF NANOPHOTONICS 10.4(2016).

入库方式: OAI收割

来源:重庆绿色智能技术研究院

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