Fabrication of 3D nanovolcano-shaped nanopores with helium ion microscopy
文献类型：期刊论文
| 作者 | Wang, Haitao1; Xie, Wanyi1 ; Wang, Yunjiao1; Zhu, Jifeng1; Liu, Mengwan1; Lu, Wenqiang1; Deng, Yunsheng1,2; Wang, Guodong1,2; Wang, Deqiang1,2
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| 刊名 | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
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| 出版日期 | 2018 |
| 卷号 | 36期号:1 |
| ISSN号 | 21662746 |
| DOI | 10.1116/1.5001927 |
| 英文摘要 | Both helium and gallium ion beams were employed to fabricate nanopores. Herein, three-dimensional nano-volcano-shaped nanopores (3D-NVNs) were directly formed using helium ion beam with no precursors required, while the gallium ion beam produced V-shaped nanopores. Hundreds of 3D-NVNs were fabricated with a mean diameter of 229 ± 7 nm, where the He ion beam milling rate for the 3D-NVNs was 3.6 ± 0.2 μm3/μC. The height of the 3D-NVNs was greater than their depth when the dose range was 0-10 nC/μm2, while the height remained constant for doses above 10 nC/μm2. Trajectory simulations of the ion bombardment into the gold film clarified that ion implantation could primarily account for the volcano-shaped nanopore formation. © 2017 Author(s). |
| 电子版国际标准刊号 | 21662754 |
| 语种 | 英语 |
| WOS记录号 | WOS:000428278600021 |
| 源URL | [http://119.78.100.138/handle/2HOD01W0/4528]  |
| 专题 | 精准医疗单分子诊断技术研究中心 微纳制造与系统集成研究中心 |
| 作者单位 | 1.Chongqing Key Lab of Multiscale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, No. 266 Fangzheng Avenue, Beibei District, Chongqing; 400714, China; 2.School of Electrical Engineering and Automation, Henan Polytechnic University, No. 2001 Century Road, Jiaozuo; 454000, China |
| 推荐引用方式 GB/T 7714 | Wang, Haitao,Xie, Wanyi,Wang, Yunjiao,et al. Fabrication of 3D nanovolcano-shaped nanopores with helium ion microscopy[J]. Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics,2018,36(1). |
| APA | Wang, Haitao.,Xie, Wanyi.,Wang, Yunjiao.,Zhu, Jifeng.,Liu, Mengwan.,...&Wang, Deqiang.(2018).Fabrication of 3D nanovolcano-shaped nanopores with helium ion microscopy.Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics,36(1). |
| MLA | Wang, Haitao,et al."Fabrication of 3D nanovolcano-shaped nanopores with helium ion microscopy".Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics 36.1(2018). |
入库方式： OAI收割
来源：重庆绿色智能技术研究院
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