Silicon-mold-based fabrication method for manufacturing polyimide membrane with nano-protuberance array structure
文献类型：会议论文
| 作者 | Yang, Zheng1,2 ; Wu, Peng1,2; Rao, Xianhua1,2; Yin, Shaoyun1,2; Du, Chunlei1,2
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| 出版日期 | 2016 |
| 会议日期 | July 18, 2016 - July 22, 2016 |
| 会议地点 | Chongqing, China |
| DOI | 10.1109/3M-NANO.2016.7824957 |
| 页码 | 217-220 |
| 英文摘要 | A fabrication method based on the silicon mold for manufacturing antireflection PI membrane with nano-protuberance array structure is proposed. In this method, a silicon mold with nano-hole array is firstly fabricated by using PS sphere self-assembly, metal coating and reactive ion etching. Then, the PI precursor solution is spin coated on the silicon mould. Followed by the imidization with gradient increased temperature, the PI membrane with nano-protuberance array structure is obtained. Tested by SEM and AFM, the proposed method possesses a high replication accuracy. The fabricated mold and membrane show large-area ordered and good uniformity. The reflection testing result shows that the proposed method can be used to decrease the reflection of PI membrane efficiently. © 2016 IEEE. |
| 会议录 | 6th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, IEEE 3M-NANO 2016
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| 语种 | 英语 |
| 源URL | [http://119.78.100.138/handle/2HOD01W0/4823]  |
| 专题 | 集成光电技术研究中心 微纳制造与系统集成研究中心 |
| 作者单位 | 1.Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing; 400714, China; 2.Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing; 400714, China |
| 推荐引用方式 GB/T 7714 | Yang, Zheng,Wu, Peng,Rao, Xianhua,et al. Silicon-mold-based fabrication method for manufacturing polyimide membrane with nano-protuberance array structure[C]. 见:. Chongqing, China. July 18, 2016 - July 22, 2016. |
入库方式： OAI收割
来源：重庆绿色智能技术研究院
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