Femtosecond Laser Direct Writing of 3D Silica-like Microstructure from Hybrid Epoxy Cyclohexyl POSS
文献类型:期刊论文
作者 | Fang, Gan1![]() ![]() ![]() |
刊名 | ADVANCED MATERIALS TECHNOLOGIES
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出版日期 | 2018-03-01 |
卷号 | 3期号:3页码:10 |
关键词 | femtosecond laser direct writing polyhedral oligomeric silsesquioxane two-photon polymerization woodpiles |
ISSN号 | 2365-709X |
DOI | 10.1002/admt.201700271 |
英文摘要 | Given the importance of epoxy cyclohexyl polyhedral oligomeric silsesquioxane (epoxy-POSS) as a silica-like hybrid material of optical clarity, high thermal and mechanic stability, the two-photon initiated polymerization of epoxy-POSS using diphenyliodonium hexafluorophosphate as photoacid generators for UV lithography and femtosecond laser direct writing is studied. The hybrid resist exhibits high thermal stability: decomposition temperatures are found at approximate to 350 and 400 degrees C when calcined in air and argon, respectively. The corresponding calcined products are found as silica-like structures with chemical formulas of C1.5SiO3.5 and C5SiO3, evidenced by energy dispersive X-ray analysis (EDX), fourier-transform infrared spectroscopy (FTIR), and elemental analysis. An equation regarding the two-photon polymerized line width as functions of intensity of laser (P-laser) and scanning speed (V) is proposed in describing the effect of Gaussian light on polymerized lines. Experimental verification of the equation is given to prove a nonlinear optical process. Line width with a resolution of 250 nm is achieved on a glass substrate, while the resolution is 400 nm when fabricated on a silicon wafer. 3D structured woodpiles are fabricated and show no volumetric shrinkage upon 300 degrees C calcination in air environment, demonstrating a high thermal stability. |
资助项目 | National Key Research and Development Program of China[2016YFA0200500 (2016YFA0200501)] ; Natural Science Foundation of China (NSFC)[61505208] |
WOS研究方向 | Materials Science |
语种 | 英语 |
WOS记录号 | WOS:000427232800009 |
出版者 | WILEY |
源URL | [http://119.78.100.138/handle/2HOD01W0/6265] ![]() |
专题 | 机器人与3D打印技术创新中心 |
通讯作者 | Cao, Liangcheng |
作者单位 | 1.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Fangzheng Ave 266, Chongqing 400714, Peoples R China 2.Chongqing Key Lab Addit Mfg Technol & Syst, Fangzheng Ave 266, Chongqing 400714, Peoples R China |
推荐引用方式 GB/T 7714 | Fang, Gan,Cao, Hongzhong,Cao, Liangcheng,et al. Femtosecond Laser Direct Writing of 3D Silica-like Microstructure from Hybrid Epoxy Cyclohexyl POSS[J]. ADVANCED MATERIALS TECHNOLOGIES,2018,3(3):10. |
APA | Fang, Gan,Cao, Hongzhong,Cao, Liangcheng,&Duan, Xuanming.(2018).Femtosecond Laser Direct Writing of 3D Silica-like Microstructure from Hybrid Epoxy Cyclohexyl POSS.ADVANCED MATERIALS TECHNOLOGIES,3(3),10. |
MLA | Fang, Gan,et al."Femtosecond Laser Direct Writing of 3D Silica-like Microstructure from Hybrid Epoxy Cyclohexyl POSS".ADVANCED MATERIALS TECHNOLOGIES 3.3(2018):10. |
入库方式: OAI收割
来源:重庆绿色智能技术研究院
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