中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Femtosecond Laser Direct Writing of 3D Silica-like Microstructure from Hybrid Epoxy Cyclohexyl POSS

文献类型:期刊论文

作者Fang, Gan1; Cao, Hongzhong1,2; Cao, Liangcheng1,2; Duan, Xuanming1,2
刊名ADVANCED MATERIALS TECHNOLOGIES
出版日期2018-03-01
卷号3期号:3页码:10
关键词femtosecond laser direct writing polyhedral oligomeric silsesquioxane two-photon polymerization woodpiles
ISSN号2365-709X
DOI10.1002/admt.201700271
英文摘要Given the importance of epoxy cyclohexyl polyhedral oligomeric silsesquioxane (epoxy-POSS) as a silica-like hybrid material of optical clarity, high thermal and mechanic stability, the two-photon initiated polymerization of epoxy-POSS using diphenyliodonium hexafluorophosphate as photoacid generators for UV lithography and femtosecond laser direct writing is studied. The hybrid resist exhibits high thermal stability: decomposition temperatures are found at approximate to 350 and 400 degrees C when calcined in air and argon, respectively. The corresponding calcined products are found as silica-like structures with chemical formulas of C1.5SiO3.5 and C5SiO3, evidenced by energy dispersive X-ray analysis (EDX), fourier-transform infrared spectroscopy (FTIR), and elemental analysis. An equation regarding the two-photon polymerized line width as functions of intensity of laser (P-laser) and scanning speed (V) is proposed in describing the effect of Gaussian light on polymerized lines. Experimental verification of the equation is given to prove a nonlinear optical process. Line width with a resolution of 250 nm is achieved on a glass substrate, while the resolution is 400 nm when fabricated on a silicon wafer. 3D structured woodpiles are fabricated and show no volumetric shrinkage upon 300 degrees C calcination in air environment, demonstrating a high thermal stability.
资助项目National Key Research and Development Program of China[2016YFA0200500 (2016YFA0200501)] ; Natural Science Foundation of China (NSFC)[61505208]
WOS研究方向Materials Science
语种英语
WOS记录号WOS:000427232800009
出版者WILEY
源URL[http://119.78.100.138/handle/2HOD01W0/6265]  
专题机器人与3D打印技术创新中心
通讯作者Cao, Liangcheng
作者单位1.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Fangzheng Ave 266, Chongqing 400714, Peoples R China
2.Chongqing Key Lab Addit Mfg Technol & Syst, Fangzheng Ave 266, Chongqing 400714, Peoples R China
推荐引用方式
GB/T 7714
Fang, Gan,Cao, Hongzhong,Cao, Liangcheng,et al. Femtosecond Laser Direct Writing of 3D Silica-like Microstructure from Hybrid Epoxy Cyclohexyl POSS[J]. ADVANCED MATERIALS TECHNOLOGIES,2018,3(3):10.
APA Fang, Gan,Cao, Hongzhong,Cao, Liangcheng,&Duan, Xuanming.(2018).Femtosecond Laser Direct Writing of 3D Silica-like Microstructure from Hybrid Epoxy Cyclohexyl POSS.ADVANCED MATERIALS TECHNOLOGIES,3(3),10.
MLA Fang, Gan,et al."Femtosecond Laser Direct Writing of 3D Silica-like Microstructure from Hybrid Epoxy Cyclohexyl POSS".ADVANCED MATERIALS TECHNOLOGIES 3.3(2018):10.

入库方式: OAI收割

来源:重庆绿色智能技术研究院

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