An orthogonal phase-shifting interferometry and its application to the measurement of optical plate
文献类型：期刊论文
| 作者 | Zhao, Yingming1; Yang, Ruofu1,2 ; Yang, Chunping1
|
| 刊名 | OPTIK
 |
| 出版日期 | 2016 |
| 卷号 | 127期号:20页码:8841-8846 |
| 关键词 | Phase-shifting interferometry Optical testing Phase measurement Jones matrix PZT phase shifter |
| ISSN号 | 0030-4026 |
| DOI | 10.1016/j.ijleo.2016.06.096 |
| 通讯作者 | Zhao, YM (reprint author), Univ Elect Sci & Technol China, Sch Optoelect Informat, 4,Sect 2,North Jianshe Rd, Chengdu 610054, Sichuan Provinc, Peoples R China. |
| 英文摘要 | An optical interferometry named orthogonal phase-shifting interferometry (OPSI) was proposed. Compared with other interferometers, OPSI works well at air turbulence and complex environment. Phase recovery method was calculated by Jones matrix for measurement of optical elements surface shape and roughness. In order to control piezo-electric transducer (PZT) shifter, the property between voltage and phase of PZT shifter was calculated. Based on this interferometry, the roughness of an unknown transparent optical plate was measured. The results show that the error of peak to valley (PV) value is 0.0087 lambda (lambda = 1064 nm) and the error of root mean square (RMS) value is 0.0006 lambda compared with WYKO(a commercial interferometer of Veeco),and this demonstrates the high stability and precision of the orthogonal phase-shifting interferometry. (C) 2016 Elsevier GmbH. All rights reserved. |
| 资助项目 | National Natural Science Foundation of China (NSFC)[61308062] |
| WOS研究方向 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000389102500084 |
| 出版者 | ELSEVIER GMBH, URBAN & FISCHER VERLAG |
| 源URL | [http://119.78.100.138/handle/2HOD01W0/3157]  |
| 专题 | 集成光电技术研究中心 |
| 通讯作者 | Zhao, Yingming |
| 作者单位 | 1.Univ Elect Sci & Technol China, Sch Optoelect Informat, 4,Sect 2,North Jianshe Rd, Chengdu 610054, Sichuan Provinc, Peoples R China 2.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Integrated Optoelect Technol Ctr, Chongqing 400714, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhao, Yingming,Yang, Ruofu,Yang, Chunping. An orthogonal phase-shifting interferometry and its application to the measurement of optical plate[J]. OPTIK,2016,127(20):8841-8846. |
| APA | Zhao, Yingming,Yang, Ruofu,&Yang, Chunping.(2016).An orthogonal phase-shifting interferometry and its application to the measurement of optical plate.OPTIK,127(20),8841-8846. |
| MLA | Zhao, Yingming,et al."An orthogonal phase-shifting interferometry and its application to the measurement of optical plate".OPTIK 127.20(2016):8841-8846. |
入库方式： OAI收割
来源：重庆绿色智能技术研究院
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