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Realization and Characterization of a Bulk-Type All-Silicon High Pressure Sensor

文献类型：期刊论文

作者Chan, Elena1; Lin, Dequan2,3; Lu, Lei1,4; Zhang, Deqiang5; Guo, Shichao2; Zhang, Yiming2; Chau, Kevin1,2; Wong, Man1
刊名JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
出版日期2018-04-01
卷号27期号:2页码:231-238
关键词Pressure sensor piezoresistive MEMS silicon bulk eutectic bonding
ISSN号1057-7157
DOI10.1109/JMEMS.2017.2786730
文献子类Article
英文摘要Distinct from conventional diaphragm-type pressure sensors, a silicon-based bulk-type high pressure sensor has been analyzed, realized, and characterized. External hydrostatic pressure acting on the sensor is converted to a biaxial compression inside an all-silicon encapsulated vacuum cavity. The stress anisotropy is analytically modeled and numerically simulated. The biaxial compression is measured using two pairs of piezoresistors oriented to optimally utilize the anisotropy of silicon piezoresistance. An improved pressure seal in the test-package allowed extended testing of the sensor up to a pressure of 200 MPa and a temperature of 175 degrees C. Reported also is a zero-offset of the sensor, largely attributed to the tensile stress induced by the insulating cover oxide after cooling from the high-temperature dopant activation anneal.
WOS研究方向Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
语种英语
WOS记录号WOS:000428934000012
出版者IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
资助机构Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Key Research Program of Chinese Academy of Sciences(ZDRW-ZS-2016-1-3) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200) ; Strategic Priority Research Program of Chinese Academy of Sciences(XDA14040200)
源URL[http://ir.iggcas.ac.cn/handle/132A11/83140]  
专题中国科学院地质与地球物理研究所
通讯作者Chan, Elena; Wong, Man
作者单位1.Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Hong Kong, Peoples R China
2.Chinese Acad Sci, Inst Geol & Geophys, Key Lab Petr Resource Res, Beijing, Peoples R China
3.Univ Chinese Acad Sci, Beijing, Peoples R China
4.HKUST Jockey Club Inst Adv Study, Hong Kong, Hong Kong, Peoples R China
5.Beijing Sllaid Sci & Technol Co Ltd, Beijing, Peoples R China
推荐引用方式
GB/T 7714		 Chan, Elena,Lin, Dequan,Lu, Lei,et al. Realization and Characterization of a Bulk-Type All-Silicon High Pressure Sensor[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2018,27(2):231-238.
APA Chan, Elena.,Lin, Dequan.,Lu, Lei.,Zhang, Deqiang.,Guo, Shichao.,...&Wong, Man.(2018).Realization and Characterization of a Bulk-Type All-Silicon High Pressure Sensor.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,27(2),231-238.
MLA Chan, Elena,et al."Realization and Characterization of a Bulk-Type All-Silicon High Pressure Sensor".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 27.2(2018):231-238.

入库方式： OAI收割

来源：地质与地球物理研究所

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