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Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point

文献类型：期刊论文

作者Li, Zongwei1; Xiong, Xingyin1; Liu, Xiong2; Han, Kedu1; Cong, Ning1; Yang, Changchun1
刊名INTEGRATION-THE VLSI JOURNAL
出版日期2017-09-01
卷号59页码:247-254
关键词Micro-electro-mechanical systems (MEMS) Interface circuit Sigma-delta Analog-to-digital converter (ADC)
ISSN号0167-9260
DOI10.1016/j.vlsi.2017.05.008
文献子类Article
英文摘要Traditional analog blocks such as integrators are widely used in high precision MEMS accelerometers. However there is few cost-effective method to address the problem of analog integrators' output saturation due to the integrators' input offsets. A high precision digital capacitive MEMS accelerometer interface based on the traditional capacitive MEMS accelerometer sigma-delta interface is proposed to address this issue. An instantaneous floating point analog-to-digital converter (IFP ADC) is proposed to convert the analog frond end amplifier (AFE) output signal to digital signal. The IFP ADC is very effective to digitalize the signal of the proposed interface circuit output, which is similar to Gaussian distribution. A Matlab simulation model is developed to evaluate the theory model. The implementation of digital loop filter realized in a FPGA board can overcome integrator offset issue. In addition, it is much easier to optimize a digital loop filter's parameter and reduce the chip cost. In this work, the AFE and voltage reference etc. are successfully fabricated by using the 0.18 pm mixed-signal CMOS process. The sensitivity and the noise floor of the AFE are respectively 0.71 V/pF and 3.16 mu V/rt(Hz) in an open loop measurement. The evaluation PCB experimental result shows that the noise floor of the system is -135dBg/rt(Hz).
WOS研究方向Computer Science ; Engineering
语种英语
WOS记录号WOS:000411419800025
出版者ELSEVIER SCIENCE BV
资助机构National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005) ; National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005) ; National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005) ; National Major Scientific Research Instruments and Equipment Development Project(ZDY2012-1-06-04) ; National Science and Technology major Project(2011ZX05008-005)
源URL[http://ir.iggcas.ac.cn/handle/132A11/61973]  
专题地质与地球物理研究所_中国科学院油气资源研究重点实验室
通讯作者Li, Zongwei
作者单位1.Chinese Acad Sci, Inst Geol & Geophys, Key Lab Petr Resources Res, Beijing 100029, Peoples R China
2.Univ Calif Los Angeles, Elect Engn Dept, Los Angeles, CA 90024 USA
推荐引用方式
GB/T 7714		 Li, Zongwei,Xiong, Xingyin,Liu, Xiong,et al. Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point[J]. INTEGRATION-THE VLSI JOURNAL,2017,59:247-254.
APA Li, Zongwei,Xiong, Xingyin,Liu, Xiong,Han, Kedu,Cong, Ning,&Yang, Changchun.(2017).Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point.INTEGRATION-THE VLSI JOURNAL,59,247-254.
MLA Li, Zongwei,et al."Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point".INTEGRATION-THE VLSI JOURNAL 59(2017):247-254.

入库方式： OAI收割

来源：地质与地球物理研究所

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