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Using pseudo electrostatic spring constant to improve the resolution of micro-machined accelerometer

文献类型：期刊论文

作者Xiong, Xingyin1,2; Cong, Ning1,2; Li, Zongwei1; Han, Kedu1
刊名SENSORS AND ACTUATORS A-PHYSICAL
出版日期2017-10-01
卷号265页码:187-192
关键词Pseudo Spring Constant Closed-loop Accelerometer Electrostatic Force-feedback Sigma-delta Modulator
ISSN号0924-4247
DOI10.1016/j.sna.2017.08.041
文献子类Article
英文摘要High-resolution accelerometers have commonly used an electrostatic force-feedback sigma-delta closed loop. In order to improve the resolution of the accelerometers, high-order noise shaping filters has been used. However, it is difficult to trade off between the stability and the noise shaping ability to design high order sigma-delta closed-loop, especially with the high-Q acceleration sensors. In this paper, a pseudo electrostatic spring constant is proposed based on the electrostatic force-feedback sigma-delta closed loop accelerometer. It uses to adjust the resonant frequency of the system transfer function to achieve a lower noise level.in the signal band, and this adjustment is outside the closed-loop without influence on the stability of the closed-loop system. The concept of the pseudo electrostatic spring constant, the system analysis and simulation are presented. The integrated measurement system is implemented on the PCB. The system noise floor can achieve about 160 ngi.s/Hz after the adjustment by using the optimal pseudo electrostatic spring constant. The experimental results confirm the theoretical analysis and simulation results. (C) 2017 Elsevier B.V. All rights reserved.
WOS关键词MICROMACHINED ACCELEROMETERS
WOS研究方向Engineering ; Instruments & Instrumentation
语种英语
WOS记录号WOS:000413381400022
出版者ELSEVIER SCIENCE SA
源URL[http://ir.iggcas.ac.cn/handle/132A11/62456]  
专题地质与地球物理研究所_中国科学院油气资源研究重点实验室
通讯作者Xiong, Xingyin
作者单位1.Chinese Acad Sci, Inst Geol & Geophys, Beijing 100029, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式
GB/T 7714		 Xiong, Xingyin,Cong, Ning,Li, Zongwei,et al. Using pseudo electrostatic spring constant to improve the resolution of micro-machined accelerometer[J]. SENSORS AND ACTUATORS A-PHYSICAL,2017,265:187-192.
APA Xiong, Xingyin,Cong, Ning,Li, Zongwei,&Han, Kedu.(2017).Using pseudo electrostatic spring constant to improve the resolution of micro-machined accelerometer.SENSORS AND ACTUATORS A-PHYSICAL,265,187-192.
MLA Xiong, Xingyin,et al."Using pseudo electrostatic spring constant to improve the resolution of micro-machined accelerometer".SENSORS AND ACTUATORS A-PHYSICAL 265(2017):187-192.

入库方式： OAI收割

来源：地质与地球物理研究所

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