Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization
文献类型：期刊论文
| 作者 | Zhou, Chao1 ; Deng, Lu2; Cheng, Long1; Cao, Zhiqiang1; Wang, Shuo1; Tan, Min1
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| 刊名 | SCANNING
 |
| 出版日期 | 2017 |
| 期号 | 2017页码:8 |
| 关键词 | Multiwalled Carbon Nanotubes Nanostructures Nanorobotic Manipulation System Electron-microscope |
| DOI | 10.1155/2017/3982503 |
| 文献子类 | Article |
| 英文摘要 | In the motion of probing nanostructures, repeating position and movement is frequently happing and tolerance for position error is stringent. The consistency between the axis of manipulators and image is very significant since the visual servo is the most important tool in the automated manipulation. This paper proposed an automated axis alignment method for a nanomanipulator inside the SEM by recognizing the position of a closed-loop controlling the end-effector, which can characterize the relationship of these two axes, and then the rotation matrix can be calculated accordingly. The error of this method and its transfer function are also calculated to compare the iteration method and average method. The method in this paper can accelerate the process of axis alignment to avoid the electron beam induced deposition effect on the end tips. Experiment demonstration shows that it can achieve a 0.1-degree precision in 90 seconds. |
| WOS关键词 | MULTIWALLED CARBON NANOTUBES ; NANOROBOTIC MANIPULATION ; ELECTRON-MICROSCOPE ; NANOSTRUCTURES ; SYSTEM |
| WOS研究方向 | Instruments & Instrumentation ; Microscopy |
| 语种 | 英语 |
| WOS记录号 | WOS:000404856100001 |
| 资助机构 | National Natural Science Foundation of China(61528304 ; Beijing Natural Science Foundation(4152054) ; 71401189 ; 61473295) |
| 源URL | [http://ir.ia.ac.cn/handle/173211/15254]  |
| 专题 | 自动化研究所_复杂系统管理与控制国家重点实验室_先进机器人控制团队 |
| 作者单位 | 1.Chinese Acad Sci, Inst Automat, State Key Lab Management & Control Complex Syst, Beijing, Peoples R China 2.Cent Univ Finance & Econ, Sch Stat & Math, Beijing, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhou, Chao,Deng, Lu,Cheng, Long,et al. Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization[J]. SCANNING,2017(2017):8. |
| APA | Zhou, Chao,Deng, Lu,Cheng, Long,Cao, Zhiqiang,Wang, Shuo,&Tan, Min.(2017).Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization.SCANNING(2017),8. |
| MLA | Zhou, Chao,et al."Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization".SCANNING .2017(2017):8. |
入库方式： OAI收割
来源：自动化研究所
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