Fabrication and Field Emission Property of Ordered Silicon Nanotip Array Based on Controllable Self-Assembly of Cesium Chloride
文献类型：期刊论文
| 作者 | Zhang XS(张新帅) ; Wang YT(王雨婷); Liu J(刘静); Wang B(王波); Zhang TC(张天冲); Yi FT(伊福廷); Zhang, XS; Wang, YT; Liu, J; Wang, B
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| 刊名 | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
 |
| 出版日期 | 2016 |
| 卷号 | 16期号:7页码:7715-7719 |
| 关键词 | Self-Assembly Cesium Chloride Ordered Array Dry Etching Silicon Nanotip Field Emission |
| DOI | 10.1166/jnn.2016.12708 |
| 通讯作者 | 伊福廷 |
| 文献子类 | 期刊论文 |
| 英文摘要 | Cesium Chloride (CsCl) is a kind of self-assembly materials. The layer of CsCl deposited on a hydrophilic substrate will reorganize into islands array when exposed to water vapor under controlled conditions. The islands array is generally disordered and the diameters of the islands are random. In this paper, we develop a method which overcomes the randomicity of the process of CsCl self-assembly and makes the process controllable. An ordered array of CsCl islands with determined quantities, diameters and positions is obtained on silicon wafer. Using the ordered CsCl islands array as masks, an ordered array of silicon nanotips is fabricated by inductively coupled plasma (ICP) dry etching. The ordered silicon nanotip array shows an excellent field emission property with a low turn-on field of 7 V/mu m at a current density of 1 mu A/cm(2). The Fowler-Nordheim plot obtained is linearly dependent, indicating the emission current arises from the quantum tunnelling effect. The ordered silicon nanotip array is expected to have important applications in field emission integrated devices. |
| WOS关键词 | CARBON NANOTUBES ; RESIST |
| 语种 | 英语 |
| WOS记录号 | WOS:000387100400157 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/260248]  |
| 专题 | 高能物理研究所_多学科研究中心 |
| 作者单位 | 中国科学院高能物理研究所 |
| 推荐引用方式 GB/T 7714 | Zhang XS,Wang YT,Liu J,et al. Fabrication and Field Emission Property of Ordered Silicon Nanotip Array Based on Controllable Self-Assembly of Cesium Chloride[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2016,16(7):7715-7719. |
| APA | 张新帅.,王雨婷.,刘静.,王波.,张天冲.,...&Yi, FT.(2016).Fabrication and Field Emission Property of Ordered Silicon Nanotip Array Based on Controllable Self-Assembly of Cesium Chloride.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,16(7),7715-7719. |
| MLA | 张新帅,et al."Fabrication and Field Emission Property of Ordered Silicon Nanotip Array Based on Controllable Self-Assembly of Cesium Chloride".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 16.7(2016):7715-7719. |
入库方式： OAI收割
来源：高能物理研究所
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