The Silicon Solar Cell with Selective Nanoscrew Pillars Fabricated by Cesium Chloride Self-Assembly Lithography and Dry Etching
文献类型：期刊论文
| 作者 | Liu J(刘静) ; Zhang XS(张新帅); Sun GJ(孙钢杰); Wang B(王波); Zhang TC(张天冲); Yi FT(伊福廷); Liu P(刘鹏); Liu, J; Zhang, XS; Sun, GJ
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| 刊名 | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
 |
| 出版日期 | 2016 |
| 卷号 | 16期号:7页码:7515-7520 |
| 关键词 | CsCl Selective Nanoscrews Hydrophobicity Silicon Solar Cell |
| DOI | 10.1166/jnn.2016.11759 |
| 通讯作者 | 伊福廷 |
| 文献子类 | 期刊论文 |
| 英文摘要 | A kind of nanoscrew pillars is selectively made on the surface of silicon solar cell to improve the solar cell performance. Nanoscrew pillars with rough side wall are fabricated by Cesium Chloride (CsCl) self-assembly lithography and inductively coupled plasma (ICP) dry etching. The nanoscrew pillars have the average diameter of from 200 nm to 1.5 mu m with the screw cycle of 150 nm linearly determined by the etching cycles. Compared with the nanopillars of smooth side wall, the nanoscrew pillars have the better antireflection property for the short wavelength ranging from 300 to 550 nm and better hydrophobicity property with the static similar to 137 degrees contact angle due to the special morphology. For the silicon solar cell covered by nanoscrew pillars on all over the entire front surface, the photovoltaic conversion efficiency (PCE) is not desirable with only 13.34%. For the solar cell covered by nanoscrew pillars only on the active area and metal electrode pattern on plain area, the PCE has been improved to 15.39% with a short circuit current density (J(sc)) of 38.21 mA/cm(2) and an open circuit voltage (V-oc) of 558.0 mV mainly benefiting from the better contacts of metal electrode pattern. |
| WOS关键词 | NANOWIRE ARRAYS ; ANTIREFLECTION ; SURFACES ; GROWTH |
| 语种 | 英语 |
| WOS记录号 | WOS:000387100400128 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/260273]  |
| 专题 | 高能物理研究所_多学科研究中心 |
| 作者单位 | 中国科学院高能物理研究所 |
| 推荐引用方式 GB/T 7714 | Liu J,Zhang XS,Sun GJ,et al. The Silicon Solar Cell with Selective Nanoscrew Pillars Fabricated by Cesium Chloride Self-Assembly Lithography and Dry Etching[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2016,16(7):7515-7520. |
| APA | 刘静.,张新帅.,孙钢杰.,王波.,张天冲.,...&Liu, P.(2016).The Silicon Solar Cell with Selective Nanoscrew Pillars Fabricated by Cesium Chloride Self-Assembly Lithography and Dry Etching.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,16(7),7515-7520. |
| MLA | 刘静,et al."The Silicon Solar Cell with Selective Nanoscrew Pillars Fabricated by Cesium Chloride Self-Assembly Lithography and Dry Etching".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 16.7(2016):7515-7520. |
入库方式： OAI收割
来源：高能物理研究所
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